Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

E16001062
0301-0300-000REV
8185249G001R
0500-00232
9090-00291
0020-96737
PKR 251
E6549-004
76.32.0337.00
NT340M
0100-90178
EN60947-4-2
04-719079-01
0090-91816
0090-91155
0020-91676
5990-0086
9090-00808
xxx
36-0132
E15000208
0567-0196-000
0020-81226
8186518G003
0100-90385
8135916G001
600-3903-03
5024E
0150-92979
E17086390
3122-0008-0001
0100-90881
9090-01196
0100-90286
0100-90451
0010-91511
PS/WG-20P-15-M3
Model 00
0020-81812
0100-90637
0090-93023
HAL 2/100
525
0150-97666
0090-91161
0090-90555, 0090-91602, 0090-91632, 0090-91535
0120-93175
3700-90243
M120660-2 revC
0100-91055
9090-01047
0020-81227
0150-92808
0040-02238
0100-90025
LS120
0100-00272
0110-00313
0020-85806
0150-97147A
0660-00600
E15004310
0400-53955
0660-90060
0270-90070
PM-P03-900
76.32.0310.00
9090-00442
CA1644000

30000218
20095084
10094412
10095394
10094864
10096207
10094827
16016656
10093944
10095802
10095425
V115
10095230
V230
10093926
30000199
16022916
10093914
10097035
20095167
4000308
10095563
10094820
10095303
10096364
10095430
10095162
10095512
10093799
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10095734
V161
10095081
10094132
10094826
10094852
10095460
10095053
10095546
10094996
10094200
16008873
10094849
10096367
10096029
20095209
16023843
10094400
10093732
10095505
10096026
10095515
10094455
10094500
4000276
10095330
10094728
30000633
4000084
10094626
4000270
16016693
10094053
10093960
10094116

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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

Harness Esserv Linear

PCB

Eaton Beam Monitor Scan Clock Card K2

On-Board IS-250FE Cryopump

Source

X Scan Controller

Pre Accel + Analysing Magnet Control Chassis

Target Cup Vac Cup

Spin Scan Relay Diagnostic Card

100-150mm Sensor Comb

Pfeiffer Vac Gauge + Manifold

Edwards E6549-004

SHIELD GUIDE TUBE BOTTOM

Turbo Pump Controller

Vacuum Control Feedback PCB

Beamline Soft Start Unit

Ceramic Insulator

Suppression Clamping Box

Dsource Vac Can

Glassman WX Suppress PSU

Utilities Pressure Switch

Mercury Slip Ring

Eaton Scan System II

Analysing Magnet Pre Stabilizer PCB

Main Computer Control

9500xR Consol Umbilical

Flat Aligner Interface PCB

PCB Motion Control BD

Front Panel Control

NOZZLE OVEN SOURCE SLEEVE

Cryo Onboard Controller

Contacter Drive PCB

CTI 9700A Cryo Compressor

Sun Micro Sparc Station 5

FI Ionisation Controller

Copper Earthing Cable

Load Lock Sensors

Extension Lead

Source Housing Gasket

Unit 4600 Beamline Interface Chassy

Vacuum Interlock PCB Card

Extraction Assy

STP Control Unit PXP80K/PXP80J

BEAM PROFILER INTERFACE BOARD

EXT I Control PCB

MRS Neutral Pump

Position Confirmation Sensor

Source Isolation Gate Valve

BNO - Batch Notch Orientor

Scan Arm Drive

Power Supply 0-20kV

330 Ionization Gauge Controller

Bushing

Wafer On H/Sink Sensor

Index Servo PCB

Suppression Power Supply

Residual Gas Analyser Unit

Cold Cathode Gauge + Manifold

SENSOR LEFT ARM

Leak Check Nozzle

Spin Scan Interface Chassis

Flight Tube Cooling Plate

D Plate Scan

Cassette Indexer Support

Filament PSU

THERMISTOR GAUGE CONTROLLER PCB

O RING 2.62 X 40.94 MULTI

SHIELD-CAPOTS-ULE

Clamp

PS/KA-PG-Driver

Chamber Sensors

PWBA GAP SERVO PCB XR80 IMPLANT

Beam Current Measurement Module

Clamp, filament, L/H

XR80 Cable

XR80 Source Cooling Tube

Wafer Arm Servo Motor

Hiden Head

PWBA 24V 1A Power Supply

Gripper Gas Line

LS-120 Floppy Drive

A Mag Control PCB

Quantum Loadport Controller

Wafer Arm Motor Drive Assy

SCREW CAPTIVE M4X14

X28C.P3/X22C.P1

Universal DAQ Module

FC Suppressor Power Supply

PFS Arc Chamber/Cooling

PCB Assy Wafer Orienter Amplifier

Chamber Blanks

Source Housing Chamber

Graphics Card PCB

Daq Inverter Extender Card

HD PFS

HiPace 300 Turbo Vacuum Pump with TC 400 Controller

INSERT INNER

Resistor Stack

Neutral Pump + CCIG (Cold Cathode Ion Gauge)

KF40 Valve + Soilenoid