Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

  • 0090-90947
  • 0040-80634, 0720-91547
  • GF125CXXC
  • -
  • 10095852
  • 10096024
  • 10094017
  • 10094665
  • 10095100
  • 10093957
  • 10095529
  • 10093958
  • 10096002
  • 10096018
  • 10094732
  • 10094989
  • 10095027
  • 10096019
  • V165
  • 10095162
  • 10095734
  • 10095053
  • 10094996
  • 10096029
  • 10095515
  • 10095330
  • 10094728
  • 10096219
  • 10095032
  • V169
  • 10094020
  • 4000379
  • 10094735
  • 10093719
  • 10095381
  • V032
  • 10093960
  • 10094824
  • 10094778
  • 10095089
  • 10095548
  • 10095578
  • 10096092
  • 11044900
  • 10095418
  • 10093988
  • 10095332
  • 10095971
  • V231
  • 10095347
  • 10093892
  • 10096220
  • 10094920
  • 10094878
  • V018
  • 10095626
  • 10095343
  • 10095526
  • 10094875
  • 10095997
  • 10096163
  • 10094813
  • 10095736
  • 10095618
  • 10096016
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  • 10093891
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  • 10095434
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  • 10093740
  • 10095189
  • 10094828
  • 10094848
  • 10095188
  • 10095563
  • 10094852
  • 10094849
  • 4000352
  • 10093995
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Cryo Lines

Beamstop Screws & Diodes

Assorted Vacuum Fittings

MFC Gas Control

Canon STG-CD PCB

Manifold

Beam Stop Flowmeter

Flight Tube

Cable Kit / Direct Drive

BEAMSTOP KIT

Bushing Cooling Flange

CTI Cryogenics Lines

Flood Gun Feedthrough

Focus Feedthrough

Flight Tubes

Focus HV Line + Cable

Blade Parts Kit

COOLING CAN CENTER

Flood Gun Gas Feedthrough

Cryo Torr Interface

KIT SHIELD QUARTERLY

MVME 215-1

MRS Neutral Pump

Bushing

Flight Tube Cooling Plate

Cassette Indexer Support

Chamber Sensors

Gripper Gas Line

PFS Arc Chamber/Cooling

Chamber Blanks

Chamber Phenumatic Lines

Chassis Plasma Flood

Litharge PA

MVME 222-2

MRS Box

IHC Upgrade Kit for Quantum III (9240-03749)

Mass Flow Control Valve GF125CXXC

Misc Spares 1 Box

MRS Source Liners

Lifting Aid Kit

LMAA

Neutral Pump + CCIG (Cold Cathode Ion Gauge)

Helium Leak Check Lines

Handler Hubs

Isolation Tube

Blade Motor Drive

Network Hub Router Interface

Implanter Wheel - 300mm (Non Populated)

Clean Leaded Glass

ASSY Bellow Rotate

Misc Service Spares

Cryo Screen

Beam Gate

Leak Check Port

Load Lock Filter

Cover

Brooks Thermal Mass Flow MFC

Multi Faraday Cup Amplifier PCB

MRS Leak Check Cans

Indexer Hub

Implanter Wheel - 150mm (Fully Populated)

Carousel Hub

ION Source Gate Valve

Cassette To Blade Set Up Jig

Liner Beam Stop

Carousel Sensors

Beamstop Leak Check Flange

Cryo Auto Purge

CRYO VANE

Calibrated Vac Leak

Chamber Wafer Sensors

Implant Accel Column Cart

Kit Test Leads

Cold Cathode Vacuum Gauge

Chamber Sensor Cables

Indexer

Clip Airlines

Manipulator Vac Can

Cassette Indexer Kit

Cassette on Tray Brackets

ION Source Vac Can

Isolation Valves

Hyperdry Vacuum System

Impant - Nova - Strobe

Beamstop Vac Flange

Baffle/Source Exhaust

Misc Vacuum Lines

KF/NW 50 Vacuum Line

Atmosphere Switch

Cold Cathode Gauge Cable

Main Shaft Blank

Canon COM-RL PCB

MRS Backing Valve

Load Lock Sensors

Leak Check Nozzle

Clamp

E500 150mm Size Change Kit

Eaton Multifunction K6

Faraday Cages

Flood Gun Assy