Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

TURBOVAC340M
0090-91657
FC-2600
0950-90265
0900-00273
547932 REV.A
E11037750
100-000-871-0
0150-95943
0090-00342
0100-90771
0100-20944
0100-90861
NPORT5610-16R
1027-0037-0001
9090-00045
9010-01609
0150-95016
0090-90352
0020-82956
E11000022
0906-0114-0001
E11001010
0090-91806
0140-90672
0150-97149
0090-93024
PT1010258-04M
TTIEX354RD
9010-013272
0020-85069
9090-01176
9090-00033
3122-0007-0001
AHA-2940W/2940UW
TSC 411
0090-90860
9010-02283
3310-00229
1183229
0090-91985
3930-90060
0100-90697
0150-95881A
E20000129
9090-01327
E17039040
E11000101
10354003 REV 4
0100-00958
E11000821
VRDM 5913/50
9240-06280
0020-85090
0040-02678
9240-04056
020-84855
E17053101
E17154260
E17066860
E11001411
0020-16195
3700-03375
00-681359-00
E15000320
0010-99166
E11087520
0020-83931
04-717625-01
101927002
0520-00062
4698-0002
E11000142
9090-01318
E15001820

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V163
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16024270
V059
10096363
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10093892
4000279
10095785
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10094920
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10095143
10094057
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1027-0055-0001
4000393
20095133
16024098
10094398
10095000
4000273
10094745
10094430
10096333
10095421
10095414
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V148
10094878
V159
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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

MRS Turbo

Beamline Instrumentation chassis

PFS Argon Controller

Area Flow Meter

Video Controller

DIP-294-2 Device Net I/O Block

Axcelis 150/200pc

PA Faraday Cage

E11037750

Pre-Alligner

Lift Bracket

Multi Faraday Cup Amplifier PCB

TRANSZORB - POST TO POST

Terminal Resistor Box

Spin Scan Error PCB

Wafer Arm Gripper Interface PCB

Spin Scan Detector

N Port Interface Server

Endstation Controller Assy

MRS Leak Check Cans

Source Magnet Power Supply (New)

Soft Drive

9500 PFS TRANSORB ASSY

Post Accel Converter 160kV

Hollow Gripper 6" 150mm

Terminal Suppression Power Supply

Unit 6800 Alien Equipment Interface

Uniformity Controller

High Voltage Power Supply

PFS Power Supply Cables

Extraction Leak Check Vac Can

Indexer Hub

Cable

COOLING CAN EXTRACT

Implanter Wheel - 150mm (Fully Populated)

Variable Supply Power Supply

Carousel Hub

ION Source Gate Valve

Top Assy DCP88I 512K 4 Port PCB

Dual Power Supply 280W

Filter Housing Handle

Blade

PRE-MRS SLIT

UNIVERSAL DAQ

ASSY 24v XP PSU

Eaton Unit1100 Relay Control Center PCB

Unit 4500 Relay Interface Chassis

Adaptec SCSI Controller

Cleanroom PC

330 Ionization Gauge Controller

Tamarack Laser System TSC 411

6KW Converter

Gas Panel - Xenon Xe

GAUGE VACUUM 1MTORR 0-15VDC NW16 PLATINU

Fan 4" 115vac Multi

WHIM Transfer Arm (RAT)

9500 Wafer Loader Contoller Pneumatic Box

Arc Voltage Control PCB

Minus 15KV Decel Chassis

X14A.P8/X1C.P4/X3A.P

Implanter Wheel - 200mm (Non Populated)

PCB Assy 8 Port Serial

QX VME CONTROL CHASSIS ASSY

Lens Apature Graphite (Large)

Assembly Carrier

P.S. Term Extraction

PCB Assy RDAC

GLASSMAN HIGH VOLTAGE

Varian Leak Test Kit

I/V CONVERTOR WHEEL BOARD

Right Elevator Controller

Power Break's

Blade Drive Motor

Cassette To Blade Set Up Jig

Quad Rotate Gripper

GROUND ELECTRODE ASSEMBLY

Heatsinks

Focus and Decel PSU Interface

XR80 Focus Assy

Manifold Leak Check Assy

Graphite Sheet

Source Manipulator Suppression Bracket

Orientor Control

Quad Rotate Gripper Conductive Finger

PASSAGE FERROFLUIDE TRANSFERT ARM

Scan Arm Bottom Lock Plate

Cassette 6"

Elevator Control Assy PCB

Assembly Moving Clip 200mm

Brake Actuator Assy

Suppression PSU Power Cable

9500 PFS APERATURE (VCI) GRAPHITE

Shield, Feedthru

INTERFACE E SERIES

Automation Wafer Handling Robot (ATM Robot) New

Unit 300

Lens Magnet Power Supply

Processor Vacuum Control PXP27G

Chamber Feedthrough

REV 3 PCB Assy Interface