Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

Tilt Interlock PCB

0100-40895

Vibration Transducer

1350-90101

Thermistor Gauge Controller

0120-90146

Unit 4600 Beamline Interface Chassy

3122-0008-0001

Pfeiffer Vac Display

DCU001

Orientor Interlock Chassis

9090-00105

Total Energy Monitor

RD200

PSU ACE-920A

0160-00016

PFG Magnet Assy

0020-80618

Tricow Delta Computer

7408-14H

Video Controller

0950-90265

Ring Isolation

00-682539-00

Scan Control PCB

0100-90315

Stepper Motor Controller

0567-0270-000

Pre-Alligner

100-000-871-0

TRANSZORB - POST TO GROUND

0150-90834

PLATE FRONT HALF SOURCE GRAPHITE

76.32.0364.00

REV 3 PCB Assy Interface

E15001820

O RING SOURCE ISO VALVE ATMOSPHERE

3700-90320

R-1 Supression PSU

E19002171

Power Supply Terminal Suppression

E11000022

Plasma Head Feedthrough

0020-80664

Plansee Suppression Graphite R150

11633332

Pen Display Monitor

3019HA03

PCB Assy M.Conta/L

E15000400

Quad Rotate Gripper 300mm

0020-25609

PCB WH I/F MDL AMPLIFIER

0100-00223

O RING 2.62 X 31.42 MUTLI

3700-90124

MRS Turbo Clamp/O Ring

0020-82644

PWBA Gap Servo PCB

0100-00991

POWER SUPPLY CONTROLLER

D-E15002350 / D-E150023

PCB Assy Exhaust Leaker Monitor

E15002030

Orienter Chamber

0010-93070

PSU XANTREX 600V 2A BIAS SP

1140-00598

Orienter Control PCB

0100-90434

On-Board IS-320FE Cryopump

8185305G001R

Platen Tilt Controller Assy

E11001051

Pneumatic Assy Chassis Source Cabinet

E11033360

PFS Cable Kit

9150-03920

PFS Chassis

9090-00104

Orienter Controller

0100-90992

PCB

0567-0272-000

Precision Electromagnet for xR80

0010-92170-ITL

Pfeiffer TCP5000 Source Turbo Control

E11003061

O RING BS0006 MULTI

3700-01007

PFS Chassis

9240-04902

Pneumatics Box

9240-02882

Retainer Front Plate 9500 Source

0020-98908

Shield 6" F/P BO

04-712165-01

Quantum Motor

04-707898-04

R2 PCB Assy RS232 MUX

E15001980

Pipe Assy, Argon, Insulated (STD)

0040-93833

Processor Vaccum Chassis

9090-91639

PCB Assy Light Link Interconnect

104854001

Pfeiffer Vacuum Turbo Pump TPH 1201PC

TPH 1201PC

Pre Aligner 300mm

100-000-871-02

PCB

0301-0287-000

Pfeiffer Turbo Control TPS600

TPS600

PWBA GAP SERVO PCB XR80 IMPLANT

0100-91055

PCB Motion Control BD

E15000208

Sensor

IQ-1000

Post Accel Converter 160kV

0090-90352

Pre-Accel/AMAG Control Chassis

9090-01356

Spin Scan Control Chassis

9090-00109

Platen Tilt Servo Controller

E11001051

Scan Monitor & Chiller Interface

5990-0027-000

PASSAGE FERROFLUIDE TRANSFERT ARM

3700-03375

Ribbon Cable

0150-92038

Plasma Flood Chassis PX42C

9090-01180

PFS Control Chassis PXP29C

9090-01415

PFC EXT Power Supply

NI100148-2-PN

Pfeiffer Turbo Pump Controller 750

E2300307

PRE-MRS SLIT

0020-85069

PCA Motor Drive DC Servo

54-0141

Power Supply Tetrode

1140-90164

SCU-1600 Turbo Pump Control Unit

YT76Z0Z00

PCB Assy RDAC

10354003 REV 4

R-A OR E500 Computer

E11092037

Plasma Flood Control Chassis

0090-91717

PCB Control Card

001-0009-01

PFS Chassis

9240-04939ITL

Scan System II PCB

0567-0302-000

Plansee Ground Electrode

11632170

Vaporizer Power Supply

0980-0081-000

Quad Rotate Gripper Conductive Finger

0020-16195

SCREW CAPITIVE M4X22

0020-85805

Steel Template

2086224

R-V PCB Three Port Loop Master

E15005380

Power Supply

0090-93027

Remote CPU

9090-00630

Ram Pad Collar

04-712186-01

Glassman WX Suppress PSU

0090-91155

Residual Gas Analyser Unit

HAL 2/100

Pfeiffer Single Gauge Control

TPG 261

Source Magnet Polarity Switch

E11134160

Plasma Flood Supply

E19002721

RF MATCH, PVD 6"

0010-20441

NOZZLE OVEN SOURCE SLEEVE

0020-81226

Platten Tilter Servo Controller

E11048890

Power Supply Accelerator Column

AHV-PG-1-180P