Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

X Clear Search

PCB Control Card

PFS Chassis

Scan System II PCB

Plansee Ground Electrode

Vaporizer Power Supply

Quad Rotate Gripper Conductive Finger

SCREW CAPITIVE M4X22

Steel Template

R-V PCB Three Port Loop Master

Power Supply

Remote CPU

Ram Pad Collar

Glassman WX Suppress PSU

Residual Gas Analyser Unit

Pfeiffer Single Gauge Control

Source Magnet Polarity Switch

Plasma Flood Supply

RF MATCH, PVD 6"

NOZZLE OVEN SOURCE SLEEVE

Platten Tilter Servo Controller

Power Supply Accelerator Column

Post Accel High Voltage 180KV

Pfeiffer Resolver Turbo Control

PS End Station Control Texion

PCB

PCB

SENSOR LEFT ARM

Range 500 SCCM Ar-Ventil

Pump Controller Operator Interface IPUP A100

PCB

Unit 5600 Beam Current Amplifier

Spin Scan Control

Pre Accel + Analysing Magnet Control Chassis

R.L-PCB Assy Dual Port Loop Master

Rev B Motion Control PCB

Unit 4700 End Station Interface Chassis

Tilt & Rotate Cont 24v

SENSOR LED DETECTOR WAFER ON BLADE

Vac Bellows

Pfeiffer Source Turbo Upgrade Parts + Vac Cable

PDU DAQ Chassis

TMH 261 Turbo Vacuum Pump with TC 600 Controller

X14A.P8/X1C.P4/X3A.P

SHIELD GRAPHITE 55X94

PWBA Wafer Orienter Microcontroller

Rectangular Dual Slit Valve

PWBA PLASMA ARC CURRENT

Variable Supply Power Supply

PWBA 24V 1A Power Supply

X28C.P3/X22C.P1

XR200 Hard Drive

TRANSZORB - POST TO POST

Unit 1600 Autocool/Watercool Chassy

Processor Vacuum Control Chassis

Quantum Loadport Controller

Source Magnet Power Supply

Right Arm Servo Control

PWBA I-V CONV PROFILER PCB

Proteus Flow Meter

Wafer Loader Control Chassis

Vacuum Robot Amplifier

HD PFS

Pneumatics Control PCB

Shield Assy for Ceramic

Soft Drive

Relais Driver / Status Interface PCB

Schaffner FN258P-55-34 3-Phase Power Line Filter

O RING 5.7 X 104.3 MULTI

Scan Arm Hard Stop 9500

PWB ION GAUGE

PWB DC Motor Drive PCB

Loop Controller PXP41W

Mecaplex Double Glovebox System

Motor Scan Activator

Humidity and Temperature Transmitter

Set Up Faraday Pre Amp

Pfeiffer Vac Control

VME Module

Edwards E6549-004

Ecoderassy Vision OBS

Unit 900 Scan Amplifier Assy

PFS Chassis

REV E Orienter Lift Assy

Supression Feed Through

Valve

O-RING 1 78D 3 68ID SILICONE

X5A.P12/X2A.P13

Phantom MXII Interface

Varian Temperature Monitor

Remote Power Supply

Pin Quick Release

TCP600 Source Turbo Control

Transfer Arm Motor

PSU ASSY 45W XP 9500 IMPLANTER (Repair)

QUANTUM PC

Power Supply 0-20kV

Tylan Flow Meter

Pfeiffer Vac Gauge + Manifold

Pre Accel & Magnet Control Chassis

PFS Chamber Liners