Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

4 Channel PWM Motor Drive

188859

150mm E Chuck

0020-32168/B, 0010-10204/B

200mm Indexer Conversion Bracket

0040-94792

Suppression Power Supply

0090-93023

Shield 6" Heater

04-712199-01

Spin/Scan Interface

0090-93095

Smoke Detector

E11038421

Accel Column

E17007400

SI Platen Roplat Multipoint Assy

E11007224

80KV Converter

0090-91917

Anti Latch PCB

0100-00415

Target Focus Faraday Assy

E11049671

200mm Heatsink Flags x 34

0020-87407

Source + Mag Ion Gauge Controller

9090-00732

Artesyn Embedded Technologies, 600W PSU

MP6-3L-00

Spin Control PCB

0100-90811

SEAL TOP BEAMSTOP

0020-95175

Vac Cable

PM 051 104 -T

Tetrode Chassis

1140-90164, 9090-00801W

Source Magnet Control PCB

0100-90872

Suppression PSU Lead

0150-97146

Source Bushing

0240-91623

24V 65W XP PSU

0090-93111

9500 PFS APERATURE (VCI) GRAPHITE

0020-83931

STP Controller - STP600

STP-600

Advance Hi-Volt 6KV Pre Accel

0090-91917W

Scan Generator Controller

E11005430

Stecker BND Indexer

X1CP3

9700 Compressor

8135916G001

STL Stewart Transformers 26kVA Transformer

1360-00103

Transformer 120/12V

ATD4020

Sun Micro Sparc Station 5

600-3903-03

Thermocouple

27-180262-00

Thermistor Gauge Controller PCB

0100-90077

Universal DAQ

0660-00633

Ultra Clean Air System Chassis

9090-01059

VME Rack

9090-00011

Shield, Feedthru

04-717625-01

Air Cylinder

04-714954-01

Wafer Arm Gripper Interface PCB

0100-90944

Accel/Decel Power Supply

5980-0059-0001

50V Specific Silicon Pro Visiion

E19007540

Wafer On Blade Sensor

0020 82873

Table Heater

04-712198-01

Wafer Arm Servo PCB

0100-90773

Temp & Gas Control Chassis

9090-00106

TM 22 Vacuum Gauge Display Unit

1027-0076-0001

Source Housing Gasket

E17086390

SHIELD GRAPHITE POST MRS SLIT

76.32.0458.00

WAFER ARM DRIVE ASSY

9010-01506

Shield Assy

0342-0934-300

Spin/Scan Control M/Board

0100-91059

Terminal Pneumatic Module

E11064970

Unit 4800 Beamline Cryo Monitor Interface

3122-0005-0001

Varian 850A CCIG Gauge

E23000001

Vacuum Control Interlock PCB

0100-90708

Varian VSEA Thermistor Gauge Cable

E16031960

SPRING DRIVE

0020-83142

Unit 4400 Terminal Interface Assy

3122-0006-0001

Toxic Gas Monitor

TLD-1

VME Rack Chassis

9090-00227

Target Vacuum Chassis

9090-00246, 0240-00961

Turbo Pump Controller

NT340M

100-150mm Sensor Comb

0020-96737

6" Ceramic Clip Ring

00-682216-00

Terminal Resistor Box

0090-00342

Unit 1600 Autocool Wafer Cooling Chassis

8452-0007-0001

Vertical Lift Orientor Control

E11001690

Unit 5000 Fibre Optic Interface

0906-0146-000

Tilt Motor

1080-90080

TURBO DRIVE TD20 CONTROLLER

800075V0005

Turbo Molecular Pump STP-A1603C

STP-A1603C

Vacuum Turbo Pump

Y266215A

Temperature Monitor

E11001200

Vacuum Gauge Interface

0100-90710

STL Transformer

9240-05229

Wafer Loader Control Chassis

0090-91563

Terminal Suppression Power Supply

E11000022

Vaporizer Control

E113434001

Target System Instrumentation

9090-00100

Unit 6800 Alien Equipment Interface

0906-0114-0001

UNIVERSAL DAQ

9090-01176

Vacuum Gauge Controller

E11000070

Wafer On H/Sink Sensor

0020-81812

Wafer Loader Blade Control

0100-90229

THERMISTOR GAUGE CONTROLLER

0100-40077

Target System Temperature Interface PCB

0100-90090

STL Three Phase Transformer

163379-1

Vacuum Gauge Control PCB

E15000080

Varian Door Lock

E19002241

Spin Scan Interface Chassis

0090-91161

Vacuum Gauge Control

0090-91462

Unit 300

4698-0002

Ziatech 8809A

8809A

Vacuum Control Interlock

0100-90556

Tetrode Diver Board

0100-00520

Table Insert

00-683445-00

Uniformity Controller

E11001010

Wafer Vacuum Chassis

9090-00255

Wafer Loader Cassette Indexer PCB

0100-90231