Source or Size Conversions
We can deliver wafer size or source upgrade, so you can enhance your equipment. All process or wafer size conversion kits are delivered, installed and qualified with minimum impact to your operation. Whether it is a field upgrade or you desire to install a used tool purchased at auction, IES can support your needs.
IES undertake 6", 8" and 12" inch size conversion kits for AMAT implanters. We provide the full kit and resource to convert your system to the size you need. In some cases we are able to offer customers trade in cash towards the original kit.
Implanter size conversion includes:
- Fully tested Hardware Kit
- Removal of existing Kit
- Installation/Conversion, Start-up & Tests
- Requalification including Process and Acceptance tests
- Warranty
- Onsite support including phone support
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IES Implant - Geometric Spacer
IES have worked closely with customers to design and manufacture a Geometric Implant Spacer. Compatible with batch implanters, the spacer will improve wafer handling and process efficiency.
Whether it is for a size conversion or to replace the existing spacer IES’ geometric spacer will help save time, and reduce cost. The adjustable spacer will achieve any desired angle while maintaining vacuum thanks to its precise manufacturing and design tolerances.
Manufactured from a high grade stainless steel, the spacer has a VITON O ring precisely allocated in the coupling. 4 UNF screws allow the spacer to change angle on every axis resulting in precise wafer handling set up.
IES has found over the years that there has been a number of spacers which have been incorrectly measured which has left many customers with bad wafer handling, the only fix for this has been to shim the spacer which can compromise the vacuum or not fully cure the problem.
Spacer Image Key
(1). Viton O-Ring Location
(2). Final Bolt-down Screw
(3). Adjusting Screw
(4). Motor Mount Screw
