Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

9090-00263 / 9090-00171
E19000790
E19000462
0090-91558, 0090-91557
481528
E11003710
E11005680, E11005370
9240-00879
E19007100
0090-91982
0090-91221
9090-00046
E11000034
E11001040
0660-90126
0900-91209
0030-90052
A1015850
0090-91033
0090-91514, 0100-91071
0660-00600
9090-90250
E19000790
0090-90880
E11048881
1140-00109
0100-00958
0520-00062
E11001411
9010-00701REV
0090-91443
9090-01397
0090-91824
9240-04056
0090-91404
1140-00248
0090-01676
VB7344840
0090-90388W
0090-90388
3620-99014
0090-91689
WSR45UM44-C
0090-93054
9090-00006
0040-97140
E11001690
0020-82956
1080-90047
0010-91511
0010-92438
0010-93038
481240
E23000001
9240-03211
9090-00314
E11001030
9090-00045
0090-91557
0090-91099, 0090-91282
9090-00791
VB7444B40
3700-99021
0100-90172
3X8G
E11003713
E11005382
0090-91158
9240-06280
0090-91985
8501314000
1140-90090
0090-90557
1140-90065
E19000800
9090-00397
1140-00152
0190-40545
VRDM 5913/50
1140-00151, 1140-00599
0010-99113
1080-00069
0090-93106
0660-90060
0660-90097
0010-91511
0090-93105

10093804
10094571
10095712
10095288
10093815
4000187
10095723
10098117
10095505
VME162-031
10096053
4000123
4000177
10096216
10094576
10095631
10095701
10095011
V054
10095832
10095564
10095699
10095010
20095089
10094402
4000079
10093928
10095859
4000026
10098136
20095195
4000025
4000400
10094340
10095689
10098073
V059
10094995
10095888
4000071
20095027
10097036
V131
10094434
4000197
4000408
10094537
10095725
10095467
4000064
V055
V136
4000060
V148
4000061
10094092
4000084
IES003129

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IHC Chassis

0-30KV Power Supply

ARC Power Supply

Spin Power Unit

ESS Magnet Power Supply

Cold Cathode Vacuum Controller

CIP Implanter Wheel - 200mm (Non Populated)

Constant Voltage Current Power Supply

Direct Drive Spin Motor 9500XR / XR80 Series *

Wafer Handler Drive Assy

WHIM Wafer Arm

Source Magnet Power Supply

Filament Power Supply

Accel Suppression Power Supply

Wafer Arm Servo Motor

VME CONTROL PCB VME162-031

Suppression Box

INSULATOR CASTING LEG

Source

160KV Stack

200KV Stack

SCIM Box

Source Bushing

Universal DAQ Module

Wafer Arm Servo and Power Supply

Scan Power Supply

Wafer Loader Vacuum Control Chassis

Platen + Faraday Control

Hard Drive

Hivolt 1000 Series Power Supply

Hi Voltage Power Supply

I/V CONVERTOR WHEEL BOARD

On Board Cryo Controller

Electrostatic Clamp Controller

Automation Wafer Handling Robot (ATM Robot) New

Orientor Control

Extraction Clamping Box

Minus 15KV Decel Power Supply

Arc Control DSP

Focus and Decel PSU Interface

Glassman Hi Voltage PSU + Decel Control Chassis

Advance Hivolt (Hitek) 1140-00248 80kV HIGH VOLTAGE CONVERTER

QUAD ROTATE CONTROLLER

Travelling Faraday

60KV Stack

OL6000 60kV Stack and Pre-Accel Converter

Turbotronik NT20 Turbo Pump Controller

Recif BNO Microcontroller NEW

Source

Power Supply

WIM ROBOT SAFETY CONTROLLER MDL

ROBOT SAFETY CONTROLLER MODULE

Plasma Flood Chassis

Source Bushing

Orientor Lifter Controller

High Voltage Resistor Stack

Hollow Gripper 6" 150mm

Wafer Arm Transfer Motor (NEW)

BNO - Batch Notch Orientor

ASSY MERC SHFT & SEAL DD VA

Extraction Assembly (Quantum)

ESS Magnet Power Supply

Cold Cathode Vacuum Gauge

Axsys Direct Drive spin motor

DAQ Type H

DOSE INTEGRATOR ASSY

Source Magnet Power Supply (New)

Spin Power Supply

Scan Amplifier *

Source Magnet Power Supply

Travelling Faraday Assembly VB7444B40

Spin Motor Ferro-Fluidic Seal

5 Phase Stepper Controller *

Scan Lead Screw

WHIM Quad Rotate Controller

Terminal Vacuum Gauge Controller

Power Supply Extraction Assy 75kV

Scan Motor Amp

Quad Rotate Gripper

WHIM Transfer Arm (RAT)

Indramat Scan Motor

Filament Power Supply *

Arc PSU

Arc Power Supply

E19000800 Trek Amplifier

Hi-Voltage 80kV Stack

Bias PSU

MOTECH PSU MP80

Blade Drive Motor

ARC Power Supply

Hollow Gripper 8" 200mm

Gripper Motor

ATMOS ELEV WH I/F ASSY

Graphics Card PCB

MVME 162-031 CPU Card

BNO - Batch Notch Orientor AMNF8

WHIM Exchange Arm