Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

Varian e500 Control Computer - Windows V15.11.10

E11297484

0-30KV Power Supply

E19000790

IHC Chassis

9090-00263 / 9090-00171

BNO - Batch Notch Orientor AMNF8

0010-91511

MVME 162-031 CPU Card

0660-90097

Graphics Card PCB

0660-90060

ATMOS ELEV WH I/F ASSY

0090-93106

Gripper Motor

1080-00069

Hollow Gripper 8" 200mm

0010-99113

ARC Power Supply

1140-00151, 1140-00599

Blade Drive Motor

VRDM 5913/50

MOTECH PSU MP80

0190-40545

Bias PSU

1140-00152

Hi-Voltage 80kV Stack

9090-00397

E19000800 Trek Amplifier

E19000800

Arc Power Supply

1140-90065

Arc PSU

0090-90557

Filament Power Supply *

1140-90090

Indramat Scan Motor

8501314000

WHIM Transfer Arm (RAT)

0090-91985

Quad Rotate Gripper

9240-06280

Scan Motor Amp

0090-91158

Power Supply Extraction Assy 75kV

E11005382

Terminal Vacuum Gauge Controller

E11003713

WHIM Quad Rotate Controller

3X8G

5 Phase Stepper Controller *

0100-90172

Scan Lead Screw

Spin Motor Ferro-Fluidic Seal

3700-99021

Travelling Faraday Assembly VB7444B40

VB7444B40

Source Magnet Power Supply

9090-00791

Scan Amplifier *

0090-91099, 0090-91282

Spin Power Supply

0090-91557

Source Magnet Power Supply (New)

9090-00045

DOSE INTEGRATOR ASSY

E11001030

DAQ Type H

9090-00314

Cold Cathode Vacuum Gauge

E23000001

Axsys Direct Drive spin motor

9240-03211

ESS Magnet Power Supply

481240

Extraction Assembly (Quantum)

0010-93038

ASSY MERC SHFT & SEAL DD VA

0010-92438

BNO - Batch Notch Orientor

0010-91511

Wafer Arm Transfer Motor (NEW)

1080-90047

Hollow Gripper 6" 150mm

0020-82956

High Voltage Resistor Stack

Orientor Lifter Controller

E11001690

Source Bushing

Plasma Flood Chassis

0040-97140

ROBOT SAFETY CONTROLLER MODULE

9090-00006

WIM ROBOT SAFETY CONTROLLER MDL

0090-93054

Power Supply

WSR45UM44-C

Source

Recif BNO Microcontroller NEW

0090-91689

Turbotronik NT20 Turbo Pump Controller

3620-99014

OL6000 60kV Stack and Pre-Accel Converter

0090-90388

60KV Stack

0090-90388W

Travelling Faraday

VB7344840

QUAD ROTATE CONTROLLER

0090-01676

Advance Hivolt (Hitek) 1140-00248 80kV HIGH VOLTAGE CONVERTER

1140-00248

Glassman Hi Voltage PSU + Decel Control Chassis

0090-91404

Focus and Decel PSU Interface

9240-04056

Arc Control DSP

0090-91824

Arc Control DSP

9090-01397

Minus 15KV Decel Power Supply

0090-91443

Extraction Clamping Box

9010-00701REV

Orientor Control

E11001411

Automation Wafer Handling Robot (ATM Robot) New

0520-00062

Electrostatic Clamp Controller

On Board Cryo Controller

I/V CONVERTOR WHEEL BOARD

0100-00958

Hi Voltage Power Supply

Hivolt 1000 Series Power Supply

1140-00109

Hard Drive

Platen + Faraday Control

E11048881

Wafer Loader Vacuum Control Chassis

0090-90880

Scan Power Supply

E19000790

Wafer Arm Servo and Power Supply

9090-90250

Universal DAQ Module

0660-00600

Spin Power Unit

0090-91558, 0090-91557

ESS Magnet Power Supply

481528

Cold Cathode Vacuum Controller

E11003710

CIP Implanter Wheel - 200mm (Non Populated)

Constant Voltage Current Power Supply

E11005680, E11005370

Direct Drive Spin Motor 9500XR / XR80 Series *

9240-00879

Wafer Handler Drive Assy

E19007100

WHIM Wafer Arm

0090-91982

Source Magnet Power Supply

0090-91221

Source Magnet Power Supply

9090-00046

Filament Power Supply

E11000034

Accel Suppression Power Supply

E11001040

Six Phase Generator

E19003380

Wafer Arm Servo Motor

VME CONTROL PCB VME162-031

0660-90126

Beam Stop 9500XR

0010-90960

Varian E500 EHP

E500

Varian E500 EHPI

E500

VIISION80

VIISION80

200/300mm Pre-Aligner with Linear Track

PRE-300BU-I-CE-S2

Brooks Wafer Handling Robot

ABM407B-1-S-CE-S2

Bruker Metrology scanner DI DTIPXM-15 (10911)

Festo CPV10-DNET16-AM-SA

9010-00177

Facilities Tray VX340

Brucker, P-Robot IO w/ 2 interlocks

Chuck Controller

Bruker Metrology Scanner

DTIPXM

Vx 300

U/I Controller

Fan Controller

Agilent TwisTorr 304

X3500-64070

EDWARDS OB 4F

8116084G002

Agilent TwisTorr 304 FS

X3500-64070