Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

0090-93106
0600-90034
0020-97557
9010-02762
E11000092
1140-00248
0020-98908
9090-00803
42749-4011
0010-92170-ITL
E15000041
0090-91557
00-678274-01
E15000080
0090-91030
5990-0013
PAA300F-24
0090-91818
1080-00069
0020-98916
8250HT
1140-90090
0040-95888
0100-99011
Y266215A
E11035771
9010-00729
0210X-CA24-BCU1
0342-1429-0002
0100-90469
800075V0005
SBA-10/100H
E42000096
E11001622
0090-91558, 0090-91557
8501314000
E19002300
0090-91859
E19000800
9090-91685
0010-91962
9090-00100
9090-00104
0040-93833
A1015850
9010-00081
9090-00626
188859
0150-97070
0100-90183
0090-91917
9090-01331
9090-00801
E6549-003
1140-90164, 9090-00801W
00-682216-00
0020-24067/A
0020-25609
0020-80618
9090-00846ITL
0090-91689
0040-45804
AP2611365
0100-90945
0270-00296
E31000148
76.32.0397.00
E11007224
0010-92515
E15000110
7408-14H
0090-91890
E17036410
E11033360
1080-90047
E11001000
E11000022

10095170
16024093
16008849
10094824
4000352
10095695
10096328
16023718
20095106
10094523
4000147
10094868
10097036
10095591
10094092
16016636
10098049
10096374
10094971
10094778
10095532
10095288
4000064
10095360
10095089
10095815
10095263
10095233
10094419
10095762
16024059
10094442
4000122
10096215
10098098
4000318
10094416
10095799
10095485
10096028
10095548
4000356
V009
10094031
10098136
10093995
10094700
V046
30000562
10095578
16016774
10095658
4000289
10098097
10095681
10094567
10095710
10095084
10095004
10094441

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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

Alum-A-Lift Scan Motor Lift

ATMOS ELEV WH I/F ASSY

Fan 9500 0600-90034

INSULATOR SOURCE ASSEMBLY

COOLED TUBE ASSY LEAPII

Helium Leak Check Lines

E500 150mm Size Change Kit

Source Magnet Power Supply

Advance Hivolt (Hitek) 1140-00248 80kV HIGH VOLTAGE CONVERTER

Scan Bracket

Eaton Multifunction K6

Retainer Front Plate 9500 Source

Pre Accel

Light Curtain Controller

Precision Electromagnet for xR80

R.L-PCB Assy Dual Port Loop Master

Fibre Optic Test Kit

Spin Power Supply

Bellows L/L RAM Assy

Vacuum Gauge Control PCB

Assy Power Supply Message

Eaton Multifunction K6

Cosel PAA300F-24 AC-DC Regulated Power Supply Module

Magnet Control

Gripper Motor

LINER BASE STD

Quadruple Alignment Jig

Faraday Cages

ARTESYN PSU

APERTURE SUPPORT CAGE

Gas Interlock PCB

Vacuum Turbo Pump

Elevator Drive Assy

GA CLIP ACTUATOR DRIVE ASSY

Rectangular Dual Slit Valve

Magnet Power Supply

Argon Bleed And Charge Monitor PCB

TURBO DRIVE TD20 CONTROLLER

ELMO MOTION CONTROL SBA-10/100H

Nyliner

Handler Hubs

REV E Orienter Lift Assy

PFS Feedthrough

Spin Power Unit

Indramat Scan Motor

Optical Encoden Assy

AMAT Source Leak Check Can

Isolation Tube

Wafer Loader Control Chassis

PFS Spares

E19000800 Trek Amplifier

ION Gauge Controller

Door Control Box

Target System Instrumentation

ExciStar 248nm Lasers

PFS Chassis

Pipe Assy, Argon, Insulated (STD)

T/C Door Micro Switch + Vibration

160KV Converter

FWI Sensor

Beamline PSU Chassis

4 Channel PWM Motor Drive

3X1BA.P2/3X8A.P6

Wafer Loader Vacuum M/Board

80KV Converter

QX+PFS & ARC PSU Chassis

Hi-Tek 80kV Stack

Edwards E6549-003

Tetrode Chassis

6" Ceramic Clip Ring

ISO Valve

Blade Motor Drive

Graphite

Quad Rotate Gripper 300mm

PFG Magnet Assy

Beamline Main Power Supply

Recif BNO Microcontroller NEW

Fixed Clip

Alcatel A100P Dry Pump

Tilt Angle Control

Flood Gun Assy

Leap II Extraction Jigs

Data Acquisition Type B PCB

TM260

Network Hub Router Interface

Mounting Supp Elec Ext

Implanter Wheel - 300mm (Non Populated)

SI Platen Roplat Multipoint Assy

Gas Panel - Silicon Tetrafluoride SiF4

COOLING CAN TURBO

Multi-Faraday Cup Amplifier PCB

X5FA.P18/X5F.P8

Tricow Delta Computer

Gas Box Controller

Liner Graphite Dipol

Pneumatic Assy Chassis Source Cabinet

1/4" Turbine

Wafer Arm Transfer Motor (NEW)

Right Arm Servo Control

Power Supply Terminal Suppression