Brooks Wafer Handling Robot
- OEM: Brooks Automation
- OEM Part Number: ABM407B-1-S-CE-S2
Description:
Part number: ABM407B-1-S-CE-S2
Manufacturer: Brooks
Includes: ESC-218BT-S293 Robot Controller
Description: Brooks wafer handling robot with controller, part of a linear track system originally used to feed 2x FOUP loaders on a Brukers DUV-X system. Compatible with other tools.
Testing status: Successfully tested.
In Stock