Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

E11092032
E17036400
0342-1431-000
TPS600
3700-90122
D38665000
9090-91639
A-01-150
ACF-500-CH
E11048890
1140-90065
0100-90090
9600/9700A
LR4210E
0090-93054
0100-90970
0010-91470
3700-90309
0906-0114-0001
361C
E19009630
9240-00859
2900 SERIES
9090-00101
D-35614 (TMH261YPX)
5980-0059-0001
100-000-943
5990-0150
9090-00801
0010-91511
0906-0146-000
E11041960
PM125
9090-01195
8115266G001
3400-99011
E19000462
E11000360
0010-92535
E11004140
3700-99003
1550-0014-300
0120-93001
E17103440
481240
94070044
5075-90171
0567-0259-000
8185247G001R
9090-01180
0040-95341
0100-90192
DL30.32.0494.00
PM 051 104 -T
GB24734-001-001-02-05
0100-91059
9090-00842REV
00-678599-02
0020-81386
E11001040
0090-90388W
1140-00166
0240-96154
04-716650-01
11633862
C-40/600
0567-0195-000
3700-90140
0690-90077
0906-0089-0001
E2300307
E17045790
0100-90859

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V136
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16016660
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V224
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V042
30000229
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V154

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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

CPU - Hard Drive Removed

Graphite Lens Liner

Magnet Cool Plate

Bushing

Arc Discharge Power Supply

Pfeiffer Turbo Control TPS600

O RING 3.53 X 107.54 VITON

Active Gauge Controller

Processor Vaccum Chassis

Leak Check Cover Beamstop

End Station Power Distribution Panel

Unitek ACF Lamination Tool

Platten Tilter Servo Controller

Arc Power Supply

Target System Temperature Interface PCB

Cryo Absorber

Pneumatics Box Chamber

Yokogawa Chart Recorder

WIM ROBOT SAFETY CONTROLLER MDL

Plasma Flooding Assy+Transport Box

Beam Profiler Mico Controller

Hollow Gripper

FERROFLUIDIC SEAL 3/8 Shaft

Unit 6800 Alien Equipment Interface

Source Isolation Valve

Turbo Pump

Clean Leaded Glass

Ergo Lift Faraday End Effector

Quad Rotate Gripper Vacuum Disptach Board

Tylan Flow Meter

Options Chassis

DAQ Power Supply

TMH 261 Turbo Vacuum Pump with TC 600 Controller

Accel-Decel Power Supply

BX300 Controller (8 Axis/3 Drives)

ASSY Bellow Rotate

Isolation Valve Source

Focus & Deflact Interface

Scope Leads

Misc Service Spares

80 Kev Pre Accel Power Supply

BNO - Batch Notch Orientor AMNF8

Unit 5000 Fibre Optic Interface

Iso Transformer

Motor PM125

Main Computer Master

Cryo On Board Interface

Tube Exhaust 9500 PTFE Corrugated

Litharge PA

ARC Power Supply

Isolation Valve

Cassette 200mm

60 KV Mirror Power Supply

Scan Arm Ferro-Fluidic Seal

Extraction Electrode

Index Control

High Voltage Lead Shield

ESS Magnet Power Supply

Magnet Power Supply + Two Spare Capacitors

Flood Gun Cooling Lines

XR200 Hard Drive

3 Cyro Remote Switch

On-Board IS-8 Cryopump

Plasma Flood Chassis PX42C

Genus VME Bus Extender card

Canon BG9-3719 BH8-0682-02 IME-IF

Dual Bellows Extraction Assembly

IV Convertor Wheel PCB

GASLINE ASSY,INSULATED

AMAT MRS Body

Pfeiffer Source Turbo Upgrade Parts + Vac Cable

Drying Controller

Spin/Scan Control M/Board

Cryo Screen

Source / Magnet Turbo Controller

Clip Ring CV Mask

HEATSHIELD ARC CHAMBER

Accel Suppression Power Supply

60KV Stack

Tetrode Power Supply

Suppression Power Supply

Cooling Line

Sensor Drive Motor

Scan Lead Screw

Source Bushing

LEAP INSULATOR

CTS Temperature and Humidity Oven

Front Panel Controller

PFS Argon Gas Line

Light Link Repair Kit

O RING SOURCE ISO VALVE VACUUM

CLIP CIRCLIP MULTI

Beam Gate

Ion Gauge Controller

Kit Leak Test Ports

Pfeiffer Turbo Pump Controller 750

Tamarack T404 Laser Air Processing Cabinet

Lens Apature Graphite (Small)

PFG Arc Power Supply

IV Convertor PSU PCB