Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

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Facilities Tray VX340

Brucker, P-Robot IO w/ 2 interlocks

Chuck Controller

Bruker Metrology Scanner

DTIPXM

Vx 300

U/I Controller

Fan Controller

Agilent TwisTorr 304

X3500-64070

EDWARDS OB 4F

8116084G002

Agilent TwisTorr 304 FS

X3500-64070

EDWARDS OB 10

8116083G002R

PFEIFFER HIPACE 700

PMP04275A

OB4F

8116085G001

Adixen ATH1600M

P2512100

Adixen ATP400

I24121

Scan Arm Ferro-Fluidic Seal

3700-99003

Scan Arm Ferro-Fluidic Seal

3700-99008

TIP-EX D9 Manifold

840-000-080

Digital Controller

22-35419-01

Cap Sensor Amplifier Board (Z)

ADE3800

Amplifier Gauge Board (y)

ADE4800

Cap Sensor Amplifier Board (y)

ADE3800

Tip Mount

VX340 Stage controller

Scanner Head

DTIPXM

NS4 MU W/FDTA Controller

Nanoscope Controller

Ioniser Bar Controller, Model 5520

Hitachi CCD Camera & Moritex Corp.

805-680-7222

VX 340 MUX Board

250-005-305

Power Distribution Box

6-0002-0366-SP

Optical Lense CS 2, Scanner Head

931-014-500

Galil Motion Control

DMC-1870

Galil Board

DMC-1870

CDAFM Scanner Head

Pre-amp

840-000-257-R

Brooks Robot Controller

6-002-0364-SP

Amplifier Gauge Board (z)

ADE4800

Stage Power Board

313-008-626

Bruker Metro Box

931-014-500

12inch Pre-aligner With Barcode Reader

6-0002-0366-SP

Wafer Indexer

15132-01

Gate Array (x)

311-000-024

Digital Signal Input Board for Vx340

700-02010-0001

DC2000 Air Table Controller

20-29362-01

Amplifier Gauge Board (x)

ADE4800

Gate Array (z)

311-000-026

X-Y Board

311-000-058

Digital Signal Processing Board

311-00-052

Z Board

311-000-039

PC

481-014-502

TIP-EX Solenoid Manifold D9

840-000-080

Cap Sensor Amplifier Board (x)

ADE3800

Signal Switching Board

312-000-077

NS4 MU FDTA Controller

Gate Array (y)

311-000-025

Galil Motion Control Board

DMC-1870

AUX Board

311-000-051

ATM Robot Motion Control Card

Head Protection Circit Board (FSD)

250-008-615

Tamarack Laser System TSC 411

TSC 411

Hotpack Temperature Humidity Oven

SUSS MICROTEC ACS200

97ACS03PP

SSEC Etch Processor

M3402

Hyperdry Vacuum System

Unitek ACF Lamination Tool

ACF-500-CH

Litrex Inkjet Printer 140P

140P

APEX 404 Pro Measurement System

CTS Temperature and Humidity Oven

C-40/600

ExciStar 248nm Lasers

Hereaus Vacucell Oven

VT6060M

Mecaplex Double Glovebox System

Macabox 80, Glovebox GB80

Tamarack T404 Laser Air Processing Cabinet

Wentworth 5 Probe Station

Dimension 9000 AFM

ROTOTILT SUB ASSY,E CLAMP

E11056420

CONTROLLER ASSY,END STATION,SERVO ROPIN

E11048881

Agilent TwisTorr 304 FS

X3500-64070

Adixen ATP400

I24121

AMAT BERNAS SOURCE,VAPORIZER COMPATIBLE,EHP

E11030995

AMAT TARGET,FOCUS,FARADAY,EHP

E11049671

EDWARDS OB 4F (right)

8116084G002

X',MIRROR 60KV ASSY.

E11029460

POWER SUPPLY,HIGH VOLTAGE,200KV,8MA MOD

E11005370

EDWARDS OB 4F (left)

8116085G002

AMAT FOCUS CUP ASSY 3 POSITION BIA

E11324420

EDWARDS OB 4F (left)

8116085G002

EDWARDS OB 10

8116083G002R

EDWARDS OB 4F (right)

8116084G002

Agilent TwisTorr 304 FS

X3500-64070

EDWARDS OB 10

8116083G002R

PLATE,TILT,SERVO,CONTROL

E11048890

Adixen ATH1600M

P2512100

AMAT BUSHING,SOURCE,70KV

E17125590

SETUP FARA CUP ASSY.

E11004840

AMAT FLANGE,SOURCE,70KV

E17092500

SETUP CHAMBER

E17001351

Laser Sensor Chassis PX41M

9090-01143

Stepscan AMP Interface

9090-00273

Source / Magnet Turbo Controller

9090-00842REV