Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

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  • E11005680, E11005370
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  • 80811 REVB
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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

Ring Isolation

Graphite Shield Analyzer (Long Upper)

Support Shields

Processor Vacuum Control Chassis

Beamstop

CIP Implanter Wheel - 200mm (Non Populated)

CHAMBER ARC

Relais Driver / Status Interface PCB

X Scan Controller

Unit 6300 Dual UStep C Drive Motor Drive

Focus Resistor Clamp

INSULATOR SHIELD

Uniteruptible Power Supply

Focus Cage

ION Source Body

PCB Assy Motion Controller

AMAT PCB

Contactor Drive Extender PCB

Source Bushing

MFC Unit UFC1662 5SCCM N2O

Liner Beam Stop

Tunnel Humidity Controller

PLATE FRONT HALF SOURCE GRAPHITE

Prometrix Corp Servo Motor Controller / Driver

Fibre Optic RCVR PCB

9500XR Consol

Ion Gauge Controller 0906-0089-0001

Focus Faraday Vac Can

GATE VALVE LINER, CLAMP PLATE

Vacuum Control Interlock

SHIELD GRAPHITE 55X94

Graphite Shield Target Entrance

On Board Cryo Controller

PFS Chassis

Source Magnet Control PCB

Plansee Ground Electrode

Carousel Sensors

Transducer Control and Plate

Orientor Interlock Chassis

ROBOT SAFETY CONTROLLER MODULE

Clarostat Sensors

Spin Control PCB

IHC Upgrade Kit for Quantum III (9240-03749)

NC Shield

CFA Indexer Body Flat Cable Assy

SEAL FLIGHTTUBE MRS FLANGE

Gas Panel - Boron Trifluoride BF3

Extraction Manipulator Controller

MFC 5SCCM AR VCR 1/4 AUTO SHUT OFF

Wafer Vacuum Chassis

O RING VITON BS377

Dowel Pins

Dial Gauge

Glassman High Voltage 20KV

Constant Voltage Current Power Supply

LTH Resistivity Monitor

Baldor AC Brushless Servo Motor

Stepscan AMP Interface

Gas Control Power Supply

Fibre Optic Graphics Modem

CTI CRYO CONTROLLER

NIB Controller Assy Servo Orienter

Cleanroom PC + Cables

Beamline Instrumentation Chassis

Alum-A-Lift Bracket

VME Rack Chassis

Beamstop Leak Check Flange

Contactor Chassis

Hidden Vacuum Head

Acid Wet Bench

MVME 222-2

Analyser Magnet Power Supply

Quad Rotate Gripper Detection Finger

ARC VOLTAGE CONTROL BOARD PCB

STL Transformer 70kVA

MRS ASSY COMM PARTS

Decel Power Supply

Cryo Auto Purge

Wafer Orienter Micro Controller

Accel Column

Actuator Bellows

Arc Voltage Control PCB

Eaton Filtered High Voltage Driver PCB

Gas Flow Control PCB Assy

PCA Motor Controller

IHC Extended Rear Panel for (9240-03749)

Wafer Arm Interlock PCB

Temp & Gas Control Chassis

SCREW CAPITIVE M4X22

Edwards iXH610 HV

Light Links Kit

Extension Lead

QUAD ROTATE CONTROLLER

Electrode PA Region AKA Bird Cage

STL Transformer

H.V Output

Unit 4900 End Station Cryo Monitor Interface

CRYO VANE

GSD200 Terminal Isolation Transformer

Brushless Servo Drive

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