Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

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Post Accel High Voltage 180KV

0342-1470-0001

Pfeiffer Resolver Turbo Control

TCP121

PS End Station Control Texion

0301-0245-000

PCB

0301-0360-000REV

PCB

0301-0311-000REV

SENSOR LEFT ARM

0150-97666

Range 500 SCCM Ar-Ventil

0248A-11011

Pump Controller Operator Interface IPUP A100

108090

PCB

E15004521

Unit 5600 Beam Current Amplifier

0261-0003-0003

Spin Scan Control

0090-93099ITL

Pre Accel + Analysing Magnet Control Chassis

9090-00291

R.L-PCB Assy Dual Port Loop Master

E15000041

Rev B Motion Control PCB

SBA-10/100H

Unit 4700 End Station Interface Chassis

3122-0009-0001

Tilt & Rotate Cont 24v

0567-0039-000

SENSOR LED DETECTOR WAFER ON BLADE

1400-90016

Vac Bellows

1016-26001REV

Pfeiffer Source Turbo Upgrade Parts + Vac Cable

PM 051 104 -T

PDU DAQ Chassis

0090-91193

TMH 261 Turbo Vacuum Pump with TC 600 Controller

D-35614 (TMH261YPX)

X14A.P8/X1C.P4/X3A.P

0150-95881A

SHIELD GRAPHITE 55X94

76.32.0205.01

PWBA Wafer Orienter Microcontroller

0100-99018

Rectangular Dual Slit Valve

0210X-CA24-BCU1

PWBA PLASMA ARC CURRENT

0100-91086

Variable Supply Power Supply

0090-93024

PWBA 24V 1A Power Supply

0100-90025

X28C.P3/X22C.P1

0150-97147A

XR200 Hard Drive

5075-90171

TRANSZORB - POST TO POST

0150-95943

Unit 1600 Autocool/Watercool Chassy

8452-0007-0001

Processor Vacuum Control Chassis

9090-00962

Quantum Loadport Controller

0110-00313

Source Magnet Power Supply

E11000092

Right Arm Servo Control

E11001000

PWBA I-V CONV PROFILER PCB

0100-90042

Proteus Flow Meter

9100C24P3

Wafer Loader Control Chassis

0090-91859

Vacuum Robot Amplifier

9090-01127

HD PFS

0240-91922

Pneumatics Control PCB

0100-91095

Shield Assy for Ceramic

00-683707-00

Soft Drive

9010-01609

Relais Driver / Status Interface PCB

0303-018118

Schaffner FN258P-55-34 3-Phase Power Line Filter

FN258P-55-34

O RING 5.7 X 104.3 MULTI

3700-90245

Scan Arm Hard Stop 9500

0020-82934

PWB ION GAUGE

0100-90227

PWB DC Motor Drive PCB

0100-90896

Loop Controller PXP41W

9090-01393

Motor Scan Activator

E12002190

Humidity and Temperature Transmitter

D0810038

Set Up Faraday Pre Amp

E11000351

Pfeiffer Vac Control

DCU001

VME Module

0660-90052

Edwards E6549-004

E6549-004

Ecoderassy Vision OBS

E11076820 REV A

Unit 900 Scan Amplifier Assy

0342-0978-0007

PFS Chassis

9090-00196

REV E Orienter Lift Assy

E11001622

Supression Feed Through

0342-0384-100

Valve

C31315000

O-RING 1 78D 3 68ID SILICONE

3700-90349

X5A.P12/X2A.P13

0150-94838

Phantom MXII Interface

ISUS2022

Varian Temperature Monitor

E11001200

Remote Power Supply

271313D

Pin Quick Release

19-229899-00

TCP600 Source Turbo Control

E23000063

Transfer Arm Motor

1080-00014

PSU ASSY 45W XP 9500 IMPLANTER (Repair)

0240-97545

QUANTUM PC

9090-01499

Power Supply 0-20kV

PS/WG-20P-15-M3

Tylan Flow Meter

2900 SERIES

Pfeiffer Vac Gauge + Manifold

PKR 251

Pre Accel & Magnet Control Chassis

0090-91463

PFS Chamber Liners

0020-86823 0020-86824

PFS Power Supply Cables

0140-90672

Resonator CTRL DI PCB

1522270

Vacuum Interlock PCB Card

0100-90881

Processor Vacuum Control PXP27G

9090-01318

Pre Accel + Magnet Control Chassis

9090-00861

Tilt Drive Assy Quantum

0010-93093

Pfeiffer Vacuum Controller

TPS301-PC0418

Wafer Arm Interlock PCB

0100-90237

Scan Clock PCB

0100-90831

Wafer Loader Control Chassis

0900-91851

PSU 300W 48V 6A 47-63HZ - VI MU4

1140-90109

X5A.P14/CSI.J1/PSI.JI,J2

0150-95169

Q1611 Corner Block T Spacer

M369

Turbo Pump Controller

0090-90993

Source Vaporizer (Qty. 5)

0020-97516

Scanning Faraday Controller | Rotating Platen Controller

E11048881

Vaporizor Power Supply

0342-0982-4001

Graphite Lens Liner

E17036410

RESOLVER ASSY COMPACTSCAN

0240-61528

QUANTUM PC

9090-00049

PSU G1 6KV

1140-00109

PS/KA-PG-Driver

M120660-2 revC