Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

  • E11003713
  • E15001670
  • 00-678319-01
  • 0270-90075
  • 0020-43486
  • E11000142
  • 0100-90811
  • 0100-94102
  • 9240-00879
  • E19000790
  • 9090-00861
  • FN258P-55-34
  • 0100-90235
  • E19000431
  • 0240-92854
  • E18001072
  • 9010-00069
  • 9010-01279
  • Macabox 80,Glovebox GB80
  • E11001200
  • 0100-90708
  • DE-816TP
  • 0090-91443
  • 0040-94763
  • 0040-99120
  • E16008970
  • 3700-99021
  • 0020-83171
  • 0040-42088
  • 0100-90315
  • E11001051
  • 0020-99637
  • E12002190
  • D-E15002350 / D-E150023
  • 0010-93011
  • BX-RSS-2-A
  • 0100-90229
  • 04-712199-01
  • 0090-91153
  • E17259760
  • 0660-90092
  • 0090-91463
  • VB7444B40
  • 25725
  • D0810038
  • E17026680
  • 0090-90557
  • 0090-91514, 0100-91071
  • 76.32.0334.00
  • E19007100
  • 1140-90162
  • E11000351
  • 0950-90366
  • BC0100A
  • 0010-93038
  • 100-000-871-02
  • 0567-0284-000
  • 8135916G001
  • E19002241
  • E19000790
  • 0342-1470-0001
  • 0090-91982
  • 0020-05843
  • 9090-01167
  • 9090-00263 / 9090-00171
  • E11005383
  • 1522270
  • TDM1.2
  • 9090-00246, 0240-00961
  • 9240-04481
  • E41447
  • 0090-91246
  • HE12-10.2-A
  • 0100-90042
  • 2086224
  • D3961600
  • PS/KL030N100Y
  • 4020-90040
  • 11210-1003R
  • E15001980
  • 3700-90112
  • 0100-01691
  • L6281-602
  • E11001621
  • 10094622
  • 10094571
  • 10095267
  • 10095704
  • 10095886
  • 10095357
  • 10096012
  • 30000677
  • 10095685
  • 10094474
  • 10094402
  • 16008847
  • 30000721
  • 4000274
  • V142
  • 10094576
  • 4000197
  • V007
  • 10095777
  • 10094875
  • 10095203
  • 10095715
  • 10094063
  • 10095543
  • 10095868
  • 10094777
  • 10095482
  • 4000022
  • 10093717
  • 10096317
  • 10095997
  • 10096216
  • 16008896
  • 10095705
  • V166
  • 10093916
  • 30000195
  • 4000014
  • 10095701
  • 10094424
  • 10095832
  • 20095088
  • 10093804
  • 10094578
  • 10098075
  • 10095747
  • 10096015
  • 10095192
  • 10094052
  • 10094835
  • 4000304
  • 10096376
  • 3000087
  • 20095041
  • 10093911
  • 16022605
  • 10093716
  • 10096163
  • 16008877
  • 10094939
  • 10095480

Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

Terminal Vacuum Gauge Controller

PCB Assy Gas Flow Control

Air Cylinder

ION Gauge Power Supply Extender PCB

Blade Plate 300mm

Magnet Power Supply

Spin Control PCB

Wentworth 5 Probe Station

Gas Interlock PCB

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Pre Accel + Magnet Control Chassis

Schaffner FN258P-55-34 3-Phase Power Line Filter

Wafer Arm Servo

Filament Power Supply

KIT,150mm VA OPTO BRD & FLAG

Blank Off Assy, Shipping, Accel Column

Cryo Leak Check Flange Kit

Carousel Relay Control

Gas Panel - Phosphine PH3

Mecaplex Double Glovebox System

Temperature Monitor

Vacuum Control Interlock PCB

D Link Ethernet Hub

Minus 15KV Decel Power Supply

CLIP ASSM WHEEL

9500 Source Cooling Tube

Light Link Cable 3U

DI Pump

Source Bushing

Spin Motor Ferro-Fluidic Seal

Clamp Plate

Fixed Clip 300mm

Scan Control PCB

Platen Tilt Controller Assy

Argon Purge Module

Graphite Beam Stop (NEW)

Calibrated Vac Leak

Motor Scan Activator

Source Body

POWER SUPPLY CONTROLLER

Lift & Rotate Controller

Ethernet Box

Wafer Loader Blade Control

View Ports

Shield 6" Heater

Magnet Power Controller Chassis

Bracket

Loop Controller

Pre Accel & Magnet Control Chassis

Travelling Faraday Assembly VB7444B40

Electromagnetic Coil

Robust Cassette on Tray Sensor

Humidity and Temperature Transmitter

E500 Graphite Used In Scanner

Chamber Wafer Sensors

Arc PSU

SCIM Box

GRAPHITE GUIDE TUBE SIDE PFS

Wafer Handler Drive Assy

HIVOLT HIGH VOLTAGE CONVERTER

Set Up Faraday Pre Amp

MVME 117-3

BUSCH BC100 Cobra Vacuum Pump

Extraction Assembly (Quantum)

Pre Aligner 300mm

AC Line Monitor

9700 Compressor

Varian Door Lock

Scan Power Supply

Post Accel High Voltage 180KV

WHIM Exchange Arm Controller (NEW)

Ferro Blank

Hi Voltage Power Supply

Chuck Power DC Power Supply PX32J

IHC Chassis

Varian Power Supply

Resonator CTRL DI PCB

AC-Servo

Target Vacuum Chassis

Feed Gun Power Supply

Safety Lance

Shorting Bar

Barrier

Hitachi 2464 Power Cable

60kV HIGH VOLTAGE CONVERTER 0090-91246

Bel Power Solutions Power Supply

IV Convertor Beam Profiler

Steel Template

Step Scan Turbo Controller

Suppression Supply

SLEEVE FILTER KF32L 5-10 HM

Gate Valve

Implant Accel Column Cart

R2 PCB Assy RS232 MUX

O RING 85.09 X 53.3 MULTI

SDS Gas Interlock PCB

Varian Backing Valve

Gas & Temp Chassis

Belt Drive Orienter Storage Assy

  • 0090-93106
  • 0600-90034
  • 0020-97557
  • 9010-02762
  • E11000092
  • 1140-00248
  • 0020-98908
  • 9090-00803
  • 42749-4011
  • 0010-92170-ITL
  • E15000041
  • 0090-91557
  • 00-678274-01
  • E15000080
  • 0090-91030
  • 5990-0013
  • PAA300F-24
  • 0090-91818
  • 1080-00069
  • 0020-98916
  • 8250HT
  • 1140-90090
  • 0040-95888
  • 0100-99011
  • Y266215A
  • E11035771
  • 9010-00729
  • 0210X-CA24-BCU1
  • 0342-1429-0002
  • 0100-90469
  • 800075V0005
  • SBA-10/100H
  • E42000096
  • E11001622
  • 0090-91558, 0090-91557
  • 8501314000
  • E19002300
  • 0090-91859
  • E19000800
  • 9090-91685
  • 0010-91962
  • 9090-00100
  • 9090-00104
  • 0040-93833
  • A1015850
  • 9010-00081
  • 9090-00626
  • 188859
  • 0150-97070
  • 0100-90183
  • 0090-91917
  • 9090-01331
  • 9090-00801
  • E6549-003
  • 1140-90164, 9090-00801W
  • 00-682216-00
  • 0020-24067/A
  • 0020-25609
  • 0020-80618
  • 9090-00846ITL
  • 0090-91689
  • 0040-45804
  • AP2611365
  • 0100-90945
  • 0270-00296
  • E31000148
  • 76.32.0397.00
  • E11007224
  • 0010-92515
  • E15000110
  • 7408-14H
  • 0090-91890
  • E17036410
  • E11033360
  • 1080-90047
  • E11001000
  • 10095170
  • 16024093
  • 16008849
  • 10094824
  • 4000352
  • 10095695
  • 10096328
  • 16023718
  • 20095106
  • 10094523
  • 4000147
  • 10094868
  • 10097036
  • 10095591
  • 10094092
  • 16016636
  • 10098049
  • 10096374
  • 10094971
  • 10094778
  • 10095532
  • 10095288
  • 4000064
  • 10095360
  • 10095089
  • 10095815
  • 10095263
  • 10095233
  • 10094419
  • 10095762
  • 16024059
  • 10094442
  • 4000122
  • 10096215
  • 10098098
  • 4000318
  • 10094416
  • 10095799
  • 10095485
  • 10096028
  • 10095548
  • 4000356
  • V009
  • 10094031
  • 10098136
  • 10093995
  • 10094700
  • V046
  • 30000562
  • 10095578
  • 16016774
  • 10095658
  • 4000289
  • 10098097
  • 10095681
  • 10094567
  • 10095710
  • 10095084
  • 10095004