Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

E11003713
E15001670
00-678319-01
0270-90075
0020-43486
E11000142
0100-90811
0100-94102
9240-00879
E19000790
9090-00861
FN258P-55-34
0100-90235
E19000431
0240-92854
E18001072
9010-00069
9010-01279
Macabox 80,Glovebox GB80
E11001200
0100-90708
DE-816TP
0090-91443
0040-94763
0040-99120
E16008970
3700-99021
0020-83171
0040-42088
0100-90315
E11001051
0020-99637
E12002190
D-E15002350 / D-E150023
0010-93011
BX-RSS-2-A
0100-90229
04-712199-01
0090-91153
E17259760
0660-90092
0090-91463
VB7444B40
25725
D0810038
E17026680
0090-90557
0090-91514, 0100-91071
76.32.0334.00
E19007100
1140-90162
E11000351
0950-90366
BC0100A
0010-93038
100-000-871-02
0567-0284-000
8135916G001
E19002241
E19000790
0342-1470-0001
0090-91982
0020-05843
9090-01167
9090-00263 / 9090-00171
E11005383
1522270
TDM1.2
9090-00246, 0240-00961
9240-04481
E41447
0090-91246
HE12-10.2-A
0100-90042
2086224
D3961600
PS/KL030N100Y
4020-90040
11210-1003R
E15001980
3700-90112
0100-01691
L6281-602
E11001621

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30000721
4000274
V142
10094576
4000197
V007
10095777
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10095715
10094063
10095543
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4000022
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10095705
V166
10093916
30000195
4000014
10095701
10094424
10095832
20095088
10093804
10094578
10098075
10095747
10096015
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10094052
10094835
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3000087
20095041
10093911
16022605
10093716
10096163
16008877
10094939
10095480

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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

Terminal Vacuum Gauge Controller

PCB Assy Gas Flow Control

Air Cylinder

ION Gauge Power Supply Extender PCB

Blade Plate 300mm

Magnet Power Supply

Spin Control PCB

Wentworth 5 Probe Station

Gas Interlock PCB

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Pre Accel + Magnet Control Chassis

Schaffner FN258P-55-34 3-Phase Power Line Filter

Wafer Arm Servo

Filament Power Supply

KIT,150mm VA OPTO BRD & FLAG

Blank Off Assy, Shipping, Accel Column

Cryo Leak Check Flange Kit

Carousel Relay Control

Gas Panel - Phosphine PH3

Mecaplex Double Glovebox System

Temperature Monitor

Vacuum Control Interlock PCB

D Link Ethernet Hub

Minus 15KV Decel Power Supply

CLIP ASSM WHEEL

9500 Source Cooling Tube

Light Link Cable 3U

DI Pump

Source Bushing

Spin Motor Ferro-Fluidic Seal

Clamp Plate

Fixed Clip 300mm

Scan Control PCB

Platen Tilt Controller Assy

Argon Purge Module

Graphite Beam Stop (NEW)

Calibrated Vac Leak

Motor Scan Activator

Source Body

POWER SUPPLY CONTROLLER

Lift & Rotate Controller

Ethernet Box

Wafer Loader Blade Control

View Ports

Shield 6" Heater

Magnet Power Controller Chassis

Bracket

Loop Controller

Pre Accel & Magnet Control Chassis

Travelling Faraday Assembly VB7444B40

Electromagnetic Coil

Robust Cassette on Tray Sensor

Humidity and Temperature Transmitter

E500 Graphite Used In Scanner

Chamber Wafer Sensors

Arc PSU

SCIM Box

GRAPHITE GUIDE TUBE SIDE PFS

Wafer Handler Drive Assy

HIVOLT HIGH VOLTAGE CONVERTER

Set Up Faraday Pre Amp

MVME 117-3

BUSCH BC100 Cobra Vacuum Pump

Extraction Assembly (Quantum)

Pre Aligner 300mm

AC Line Monitor

9700 Compressor

Varian Door Lock

Scan Power Supply

Post Accel High Voltage 180KV

WHIM Exchange Arm Controller (NEW)

Ferro Blank

Hi Voltage Power Supply

Chuck Power DC Power Supply PX32J

IHC Chassis

Varian Power Supply

Resonator CTRL DI PCB

AC-Servo

Target Vacuum Chassis

Feed Gun Power Supply

Safety Lance

Shorting Bar

Barrier

Hitachi 2464 Power Cable

60kV HIGH VOLTAGE CONVERTER 0090-91246

Bel Power Solutions Power Supply

IV Convertor Beam Profiler

Steel Template

Step Scan Turbo Controller

Suppression Supply

SLEEVE FILTER KF32L 5-10 HM

Gate Valve

Implant Accel Column Cart

R2 PCB Assy RS232 MUX

O RING 85.09 X 53.3 MULTI

SDS Gas Interlock PCB

Varian Backing Valve

Gas & Temp Chassis

Belt Drive Orienter Storage Assy