Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

  • 0342-0562-200
  • C800-65/65CSCR
  • 0270-90203
  • 112212002
  • 3122-0009-0001
  • 9090-01128
  • TVR-DC10
  • 020-84855
  • 12040-PA24-00
  • 0100-90183
  • 0100-90192
  • PEIFFER TCP1
  • 101927002
  • 0100-01691
  • X1CP2
  • E17013130
  • E17103440
  • D-35614
  • 1400-90017
  • 0010-99078
  • 0100-94029
  • PV25PKA-DBL-B
  • 0100-90093
  • 1000900
  • E11373450
  • 76.32.0310.00
  • 0150-94651
  • 0100-90485
  • 3122-0007-0001
  • 3700-90123
  • E101344
  • 11423
  • 04-712167-01
  • 1550-0014-300
  • 0020-84222
  • BSM80N-375BA
  • ACB102121100
  • 9090-01144
  • 5990-0003-000
  • E18010570
  • 5990-0150-000
  • 9010-02283
  • 0040-02678
  • E15000204
  • E15001670
  • 0100-90809
  • 5990-0009-0001
  • E11000142
  • E15000031
  • 0270-90201
  • TMU260
  • E11000090
  • 0040-99208
  • 481166
  • INR-498-003B
  • E22000005
  • 600-3492-01
  • 0500-00232
  • 0090-90555, 0090-91602, 0090-91632, 0090-91535
  • E15004310
  • 0100-90469
  • 0100-90859
  • E37000094
  • ATMML-7-E25Z
  • 3310-90003
  • 42749-4011
  • E20000129
  • 0600-90034
  • D38665000
  • 0090-90983, 9090-00099, 0090-91664
  • 0100-90697
  • 9090-00640
  • 00-678450-01
  • 8135940G001R
  • 0010-92438
  • 0020-85167
  • E11029490
  • 0020-91676
  • 8501314000
  • E31000148
  • 0100-91087
  • C41646000
  • 9240-01154
  • 187ART2800
  • E11001000
  • 0020-82399
  • 0040-95292
  • E16001063
  • E11041960
  • 0040-80384
  • 0100-00929
  • 0567-0232-000
  • 1080-00033
  • 0909-01180REV
  • 04-710446-06
  • E15004390
  • 0906-0108-0001
  • 9090-00011
  • 0100-90451
  • 3700-90140
  • 10098069
  • 3000088
  • 10096361
  • 10093932
  • 10093736
  • 10098116
  • 10094416
  • 10094638
  • 3000084
  • 10096309
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  • 16022918
  • 10094952
  • 10096245
  • 16016693
  • 4000309
  • 4000315
  • 10098057
  • 16008856
  • 4000402
  • 10093924
  • 30000186
  • 10095193
  • 30000204
  • 20095133
  • V159
  • 10094497
  • V174
  • 10098080
  • 30000175
  • 10093757
  • 20095084
  • 10094200
  • 16008859
  • 10094523
  • 10094430
  • 16024093
  • 20095042
  • 10095960
  • 16008855
  • V230
  • 4000064
  • 30000562
  • 30000135
  • 30000170
  • 10095683
  • 16022915
  • 30000236
  • 10094476
  • 4000380
  • 30000188
  • 20095083
  • 10096383
  • 10094551
  • 16022930
X Clear Search

Source Can

Varian Alum-A-Lift

Wide Beam Jig

X Site Assy 200mm

Unit 4700 Endstation Interface Chassy

Vaccum Robot Amplifier Chassis

TC Gauge

XR80 Focus Assy

ISO Valve

Wafer Loader Vacuum M/Board

IV Convertor Wheel PCB

Resolver Aperture Turbo Control

INTERFACE E SERIES

SDS Gas Interlock PCB

Indexer Input Cable

Right Hand Orient Sensor

High Voltage Lead Shield

Pfeiffer Source Turbo PSU

SENSOR LED EMITTER WAFER ON BLADE

ASSY FLT TUBE W/DUMP MARK II

ARC VOLTAGE CONTROL BOARD

MRS Turbo Backing Valve

Ion Gauge Power Supply

Terra PC System

Kit Replacement NCS PSU

INSERT INNER

X5FA.P16/X5F.P2

Orienter Control PCB

Unit 4500 Relay Interface Chassis

O RING VITON BS377

Low Voltage Computer Cable

TURBO VAC 361C

Spring

Extraction Electrode

FINGER LONG GRIPPER

Baldor AC Brushless Servo Motor

Edwards iXH610 HV

Laser Controller Handling

Fibre Optic Controller

Ergo Turbo Lift

Focus & Deflect Interface

Gas Panel - Xenon Xe

Heatsinks

PCB Assy Motion Controller

PCB Assy Gas Flow Control

Indexer Servo PCB

Eaton HVPS Thermocouple Interface PCB

Analyzer Magnet PSU

I/O Digital Multi PCB

Dual Bellows Extraction Alignment Jig

Pfeiffer Turbo

Quad Magnet Power Supply

Extended Source Housing Chamber

ESS Power Supply

Thermo Chiller

Glassman P.S PS/MK30P 025

GSD200 Sun Sparcstation 5 PC

X Scan Controller

Filament PSU

PCB Assy Wafer Orienter Amplifier

Argon Bleed And Charge Monitor PCB

IV Convertor PSU PCB

Gauge Nude

Fan Filter Unit

GAUGE VACUUM 572 KF25

Light Curtain Controller

PCB Assy 8 Port Serial

Fan 9500 0600-90034

Active Gauge Controller

Arm Gripper Controller

Arc Voltage Control PCB

G2 PROTECTION RESISTOR BOARD

Interlock & Control Interface PCB

CTI IS-1000 Compressor LV

ASSY MERC SHFT & SEAL DD VA

FINGER SHORT GRIPPER

Faraday Set-Up Assy

Mercury Slip Ring

Indramat Scan Motor

TM260

PWBA SOL/FIL EXT INTERFACE

Valve

Quad Rotate Gripper Detection Finger

Wafer Orienter Micro Controller

Left Arm Servo Controller

SEAL GASKET GRAPHITE BEAMSTOP 3 POSITION

Heatsinks

Harness Linear Motion Servu

Iso Transformer

IHC Extended Rear Panel for (9240-03749)

I/V CONVERTOR BEAM PCB

PCB

Quad Rotate Gripper Motor

FI Controller Chassis

ViPS Can

PCB Assy Terminal Controller

Unit 6300 Dual UStep C Drive Motor Drive

VME Rack (Missing All Circuit Boards)

EXT I Control PCB

O RING SOURCE ISO VALVE VACUUM