Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

0020-82890
MP6-3L-00
0303-0112
1140-90129
A2688VEF22-A0
DCU001
0720-00407
76.32.0391.00
00-678552-02
0090-91099, 0090-91282
E19002370
3700-90320
9240-02882
0567-0212-000
9090-000152
04-712165-01
0100-90930
9010-00678
9411
E11001000
TCP121
0301-0245-000
E11000070
0270-09227-A
E112321003
D02171000
3122-0009-0001
0360X-CA24
740-A01
D-35614
0270-90179
0303-0130
STP-H1000
28-200704-00
0100-99018
0100-90491
0020-82399
0567-0241-000
0020-80664
9090-00791
9090-00456
E11029460
E11000821
0100-01884
76.32.0316.00
E17036410
0090-91193
E81000120
1140-90090
9090-01267
0100-90463
E17026690
STP-A1603C
0010-92190 ITL
00-682547-00
D04847000, D38661000
0569-0196-000
1016-26001REV
0100-90327
0240-93054
E16031960
0090-90966
E37000094
0240-61414
0567-0270-000
9090-00011
0010-93173
03112-LA24-AKV1
04-712198-01
URDM5913/50
M369
9010-01600
PS/KL020N100YU6
E19006050
0040-97599
E17069400/1
0100-90992
0567-0272-000
76.32.0392.00

V149
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20095148
10096369
10094846
10094813
16022909
V131
16022929
10096020
30000198
10095469
10095683
10094786
30000222
10093877
10095199
10094440
10096302
10093706
10094785
10094590
V180
10094463
10095387
16022915
30000200
3122-0003-0001
10094171
20095056
10094737
10095736
16008843
10096336
10095749
10095364
V055
10093904
10096337
10093751
10095487
10094999
30000211
10094720
10095224
V021
10094831
10096129
10095191
30000194
10094551
10095383
10096153
10095241
30000132
20095185
10095317
0021-90298
10096307
10095522
30000171
30000193
16008867

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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

Ceramic Blade

Artesyn Embedded Technologies, 600W PSU

8 Channel Driver & Monitor PCB

Pre Defining Aperture

Focus Decel Control + Power Supply

FI Pump

Focus/Deflector Power Supply

Pfeiffer Vac Display

CENTRECOM MX10S AUI-BNC

Kit Test Leads

BEAMSTOP GRAPHITE BLOCK 3 POS P'KIT

Flex Tube Assy

Scan Amplifier *

Air Bearing E19002370

O RING SOURCE ISO VALVE ATMOSPHERE

Pneumatics Box

Micro Step Controller

Extraction Clamp Box

Shield 6" F/P BO

ARC VOLTAGE CONTROL BOARD

COOLED TUBE ASSY LEAPII

E-P-Wandler Bloch

Left Arm Servo Controller

Pfeiffer Resolver Turbo Control

PS End Station Control Texion

Vacuum Gauge Controller

Chamber Lid / Viewport

Ergo Effector

PCB Sub Assy Dose Controller

Edwards Vacuum Gauge

Clip Actuator

Unit 4700 End Station Interface Chassis

Dual Slit Valve

Door Drive Motor & Linear Actuactor

Dot Two Resistivity Digital Controller

Pfeiffer Source Turbo PSU

Cassette Indexer Jig (Comb to Array)

VME PCB

Eaton Data Conversion PCB

STP Controller - STPH1000

Flex Tubing Assy

PWBA Wafer Orienter Microcontroller

Wafer Arm Position PCB

Pressure Gauges x3

SEAL GASKET GRAPHITE BEAMSTOP 3 POSITION

Beam Monitor Back Plate

Unit 4600 Beamline Interface Chassis

Plasma Head Feedthrough

Source Magnet Power Supply

Beamline Vacuum Control Chassis

Electrode

Right Elevator Controller

PWBA ARC VOLTAGE CONTROL BOARD

Cold Cathode Vacuum Gauge

LINER ANTICATHODE

Graphite Lens Liner

PDU DAQ Chassis

Varian E500 Source

8200 Compressor NEW

Filament Power Supply *

Power Supply 29Z

Gap Servo PCB

Flat Orienter Assy 150mm

Graphite Scanner

Turbo Molecular Pump STP-A1603C

200mm Cassette Lift and Rotate Assy

Heat Distribution Plate

Gauge Control

Spectra Gas Analyser

Front Panel Control

Vac Bellows

APEX 404 Pro Measurement System

Wafer Orienter Microcontroller

AR MFC Contoller

Post Accel Drive

Varian VSEA Thermistor Gauge Cable

DAQ MKII Type B

Extraction Assemblies (Qty 12)

Gauge Nude

ASSY HD PFS HEAD QUANTUM

Roof Fan

Stepper Motor Controller

VME Rack (Missing All Circuit Boards)

ASSY TETRODE ION

VAT Slit Valve

Table Heater

Manipulator Graphite Kit

Lift & Rotate Assembly

Blade Drive Motor + Ferrofluidic

Q1611 Corner Block T Spacer

MRS Assembly

High Voltage Power Supply

PFS Cooling Lines

SHIELD FILAMENT

Koll Morgan Carriage Motor

Fixed Restraints

Alignment Bracket

Orienter Controller

PCB

RING SUPP EXT