Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

Remote Display Keypad Module

0190-12160

QX VME CONTROL CHASSIS ASSY

9090-01327

Z Bot 2

C01-6300

XR80 Cable

0150-92808

Vac Gauge

20347057

QX+PFS & ARC PSU Chassis

9090-01331

GUIDING TUBE PCB

0100-91085

Pre Accel

9090-00803

Quad Rotate Gripper Vacuum Disptach Board

9240-00859

Wafer Arm Gripper Interface PCB

0100-20944

Graphite Sheet

E17154260

Graphite Shield Analyzer (Long Upper)

E17145700

Remote Pump Controller

IQDP80-QMB500

SEAL BOTTOM BEAMSTOP

0020-95176

VME PCB

VERSION V6000

Power Distribution Box

300-003-873

Hard Drive Formatted Disk Drive

5075-90171

Scan PSU

P5350

KIT,150mm VA OPTO BRD & FLAG

0240-92854

Varian Backing Valve

L6281-602

Hall Probe Amplifier

E11053620

Processor Vaccum Control Chassis

9090-00923

Software Tape

5075-90163

Vacuum Interlock

0100-90479

Heat Exchanger

10246-0301

GRAPHITE GUIDE TUBE TOP PFS

76.32.0336.00

Indramat Cable

INK200-06-27-016

Elevator Drive Assy

E11035771

Leap II Extraction Jigs

0270-00296

Fixed Restraints

0040-97599

Axcelis 160KV upgrade Kit

Axcelis 160KV upgrade Kit

LINER BEAMSTOP

0020-80452

APERTURE PRE-DEFINING

76.32.0388.00

Gap Servo PCB

0100-90463

Electde Focus Twin F/Thro R340

0020-49487/B

Hitachi Sense PCB

568-5531

Hollow Gripper

9010-00456

Multi-Faraday Cup Amplifier PCB

E15000110

Motor PM125

PM125

Dose Intergrator

E11001033

Kestrel Spindle

E11124540

MODIFIED VACUUM PUMP

0015-00512

Bias Power Supply

1140-90180, 1140-90182

Heat Exchange Control Box

0240-61574

ASTEC PSU 48V 31.9A O/P

1140-90189

Tube Exhaust 9500 PTFE Corrugated

3400-99011

Ion Gauge Controller

0906-0089-0001

X5FA.P5/X5F.P9

0150-94646

Unit 4400 Implanter Terminal Interface Chassis

3122-0006-0001

GUIDE TUBE SIDE PFS

76.32.0335.00

VENDOR INTERFACE PRE ACCEL PCB CARD

0100-00790

Scan System II PCB

5990-0086-000

GROUND ELECTRODE ASSEMBLY

0020-85090

Wafer Orienter Microcontroller

0100-90327

Iso Valve

42500426

Source Can

0342-0562-200

Varian Alum-A-Lift

C800-65/65CSCR

Wide Beam Jig

0270-90203

X Site Assy 200mm

112212002

Unit 4700 Endstation Interface Chassy

3122-0009-0001

Vaccum Robot Amplifier Chassis

9090-01128

TC Gauge

TVR-DC10

XR80 Focus Assy

020-84855

ISO Valve

12040-PA24-00

Wafer Loader Vacuum M/Board

0100-90183

IV Convertor Wheel PCB

0100-90192

Resolver Aperture Turbo Control

PEIFFER TCP1

INTERFACE E SERIES

101927002

SDS Gas Interlock PCB

0100-01691

Indexer Input Cable

X1CP2

Right Hand Orient Sensor

E17013130

High Voltage Lead Shield

E17103440

Pfeiffer Source Turbo PSU

D-35614

SENSOR LED EMITTER WAFER ON BLADE

1400-90017

ASSY FLT TUBE W/DUMP MARK II

0010-99078

ARC VOLTAGE CONTROL BOARD

0100-94029

MRS Turbo Backing Valve

PV25PKA-DBL-B

Ion Gauge Power Supply

0100-90093

Terra PC System

1000900

Kit Replacement NCS PSU

E11373450

INSERT INNER

76.32.0310.00

X5FA.P16/X5F.P2

0150-94651

Orienter Control PCB

0100-90485

Unit 4500 Relay Interface Chassis

3122-0007-0001

O RING VITON BS377

3700-90123

Low Voltage Computer Cable

E101344

TURBO VAC 361C

11423

Spring

04-712167-01

Extraction Electrode

1550-0014-300

FINGER LONG GRIPPER

0020-84222

Baldor AC Brushless Servo Motor

BSM80N-375BA

Edwards iXH610 HV

ACB102121100

Laser Controller Handling

9090-01144

Fibre Optic Controller

5990-0003-000

Ergo Turbo Lift

E18010570

Focus & Deflect Interface

5990-0150-000

Gas Panel - Xenon Xe

9010-02283

Heatsinks

0040-02678

PCB Assy Motion Controller

E15000204

PCB Assy Gas Flow Control

E15001670