Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

  • 5990-0050
  • 74111374
  • 5990-0048-0004
  • 0020-05843
  • D02171000
  • 0567-0196-0001
  • 262-1154
  • 9600515
  • 0520-00062
  • E17046640
  • 9090-00033
  • 5990-0013
  • E17036410
  • DL63.32.0096.00
  • 9090-00314
  • 0090-91806
  • 8116148G004
  • AHA-2940W/2940UW
  • 740-A01
  • 5990-0115
  • 0040-42088
  • 0900-00273
  • 0090-91404
  • 3080-90010
  • 9090-01033
  • 1140-00154, 1140-00600, 1140-90182
  • 0760-90008
  • 9010-00701REV
  • 9010-02087
  • PCA1033
  • E17026680
  • 211-9314
  • E11000360
  • 5990-0008-000
  • 0270-90179
  • VT6060M
  • 9240-06830
  • 0020-98916
  • 547932 REV.A
  • E118871
  • 9010-01870
  • I300
  • FN258P-75-34
  • 0010-92535
  • 00-678599-02
  • 9240-03211
  • AMGCOG-211
  • 0270-90071
  • 9090-01275
  • E78000179
  • E11304631
  • 9090-00145
  • X1CP1
  • 0100-90286
  • 1070-00026
  • 9090-00695
  • 0120-93001
  • 0720-00407
  • PS/KL020N100YU6
  • 0100-90385
  • 80432026002
  • 9010-02762
  • A0705457
  • 0140-99009
  • E41447
  • 0342-0838-400
  • 0010-91511
  • 11633862
  • 0020-81386
  • E11000821
  • E11001062
  • 9240-03749
  • 960-00036-000
  • 0090-91815
  • 9090-01392
  • EGC38
  • 1140-00152
  • E11092037
  • PV40PKA DBL-B
  • 9090-00827
  • 00-682547-00
  • 0567-0027-000
  • E23000001
  • 3030-18908
  • 0020-99635
  • 94070044
  • 0010-92095
  • DE303
  • 9090-00961
  • PC833
  • DE-816TP
  • 0100-90790
  • E17039040
  • E16008960
  • 9090-00097
  • A-01-150
  • 0010-91802
  • 0690-90077
  • 0100-91105
  • 9090-00397
  • 10094593
  • 10094424
  • 10094440
  • 3000093
  • 16024097
  • 10094567
  • 16016629
  • 20095027
  • 10095269
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  • 20095089
  • 20095157
  • 10096317
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  • 30000209
  • 10094590
  • 16016636
  • 10094810
  • 4000303
  • 20095176
  • 10098124
  • 30000151
  • 10094610
  • 16023958
  • 10094065
  • 3000085
  • 10094069
  • 10098095
  • 10098176
  • 10096240
  • 4000304
  • 10098068
  • 10094995
  • 16016660
  • 10095686
  • 10095694
  • 4000382
  • 10095232
  • 4000060
  • 10094133
  • 30000189
  • 4000071
  • 10096385
  • 10095562
  • 20095066
  • 20095071
  • 10098125
  • 10094474
  • 10094453
  • 10096333
  • 4000275
  • 10095899
  • 10094389
  • 16008857
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Eaton Flow Control Source Gas PCB

Dial Gauge

Eaton Stepper Motor Controller PCB

Ferro Blank

Edwards Vacuum Gauge

Eaton Front Panel Control

Extension Lead

Fan 9500 PAPST 4214NGN

Automation Wafer Handling Robot (ATM Robot) New

Ball Screw Elevator Drive

ASSY 24v XP PSU

Eaton Multifunction K6

Liner Graphite Dipol

FILAMENT ARC CHAMBER 2.4 PURE

DAQ Type H

Control ChassisFocus Supply + Decel/Focus

CTI ON BOARD 10 CRYOPUMP

Adaptec SCSI Controller

Dot Two Resistivity Digital Controller

Eaton Scan & Chiller PCB

Fixed Clip 300mm

DIP-294-2 Device Net I/O Block

Glassman Hi Voltage PSU + Decel Control Chassis

BELT TIMING HANDLER & IMP

Gas box PSU Chassis

Filament Power Supply

Flexible Coupling

Extraction Clamping Box

MRS Assembly

Glassman PCB

E500 Graphite Used In Scanner

4650 Z Series Axial Fan

Isolation Valve

Channel Driver & Monitor

Cassette Indexer Jig (Comb to Array)

Hereaus Vacucell Oven

Implanter Wafer Cooling Test Kit

LINER BASE STD

Axcelis 150/200pc

CM 22AWG Power Cable

DI Water Manifold

Jema Elec I300 Isolation Transformer

Line Filter

Cassette 200mm

Clip Ring CV Mask

Axsys Direct Drive spin motor

Heatsinks

Contactor Drive Extender PCB

B/L Instrumentation Chassis PX80F

Beamline Exhaust Tube

Motor Lift Assy Roplat

Chassis Monitor PCB

Indexer Input Cable

BEAM PROFILER INTERFACE BOARD

Die Current Monitor

Beamline Instrumentation Chassis

Index Control

CENTRECOM MX10S AUI-BNC

High Voltage Power Supply

Contactor Drive PCB

Cryo Compressor Controller

COOLED TUBE ASSY LEAPII

IS Controller

CFA Indexer Body Flat Cable Assy

Hitachi 2464 Power Cable

Beam Guide

BNO - Batch Notch Orientor

LEAP INSULATOR

HEATSHIELD ARC CHAMBER

Left Elevator Controller

Linear Motor Servo Controller

IHC Upgrade Kit for Quantum III (9240-03749)

Clarostat Sensors

Cleanroom PC + Cables

IHC Source Controller Chassis

Leybold EGC 38

Bias PSU

COMPUTER ASSEMBLY, CONTROL

MRS Exhaust

Loop Controller

Heat Distribution Plate

Ion Gauge Controller

Cold Cathode Vacuum Gauge

MFC 5SCCM AR VCR 1/4 AUTO SHUT OFF

BEAMSTOP GRAPHITE LEAP II

Magnet Power Supply + Two Spare Capacitors

Carousel Controllers

Interface Server

Laser Sensor Chassis

Brushless Servo Drive

D Link Ethernet Hub

Arm Position Sensor PCB

Lens Apature Graphite (Large)

Light Link Cable 1U

Beamline Instrumentation Chassis

Leak Check Cover Beamstop

MRS ASSY COMM PARTS

CLIP CIRCLIP MULTI

I/V Converter Power Supply Board

Hi-Voltage 80kV Stack