Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

E11001030
0090-91422
0090-91717
IQDP80-QMB500
0090-91917
3122-0006-0001
5990-0048-0004
0301-0360-000REV
8116148G004
0100-90231
A96496651 P20
108090
3122-0006-0001
E101344
0090-91917
0020-95176
E21000106
E23000063
ATMML-7-E25Z
E15000201
0301-0287-000
9090-00659
9090-00109
0110-91085
E15002390
200011-563 6
0120-90146
9090-01416
0020-82131
0040-07593
11633332
NI011364-0-S
0010-93093
3700-90124
E11064970
0100-90287
E78000179
E16031960
9090-00640
0100-00991
3700-01051
9090-01326
0090-91484
42500426
E11514620
DCU001
0100-90809
0020-95175
RD200
0100-90286
0010-93070
Axcelis 160KV upgrade Kit
1140-00598
1080-90080
0010-92132
0020-98619
0010-92095
0100-90761
00-678450-01
8809A
LB1-LD03M61
0090-91841
0342-1432-0001
E15005380
HP75CN
0020-99636
211-9314
04-714954-01
FN258P-75-34
9090-00314
5990-0009-0001
3690-90526
00-683443-02
EGC38
5350001
A0705457
E11001062
0015-00512
0150-92038
0040-94458 & 0010-91214

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16008903
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10095852
30000208
10096024
4000149
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V223
10096299
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20095027
16008885
10095694
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10094665
30000437
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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

DOSE INTEGRATOR ASSY

Suppression Feedthrough

Chamber Sensor Cables

Plasma Flood Control Chassis

Blade Drive

Remote Pump Controller

Bushing Supports

Indexer

HITEK DUAL RANGE PRE ACCEL PSU

Unit 4400 Implanter Terminal Interface Chassis

Eaton Stepper Motor Controller PCB

PCB

CTI ON BOARD 10 CRYOPUMP

Wafer Loader Cassette Indexer PCB

Heat Exchange Pump

Pump Controller Operator Interface IPUP A100

Unit 4400 Terminal Interface Assy

Low Voltage Computer Cable

80KV Stack

SEAL BOTTOM BEAMSTOP

PO Supply 300 Watts

TCP600 Source Turbo Control

Cryo Lines

Fan Filter Unit

PCB Assy Motion Controller

PCB

G2 SERIES PROTECTION RESISTOR

Beamstop Screws & Diodes

Source Bushing

Spin Scan Control Chassis

GUIDING TUBE PCB

PCB Assy Control BD Multi Vac

Flood Gun Power Supply

Thermistor Gauge Controller

Assorted Vacuum Fittings

Resistor PXP99B

Clamp 9500 L/H PFS Filament

Thermistor Gauge Cable

Heatsink 200mm

Plansee Suppression Graphite R150

6kV Suppression Power Supply

Tilt Drive Assy Quantum

O RING 2.62 X 31.42 MUTLI

Terminal Pneumatic Module

Beam Profiler Microcontroller PCB

Beamline Exhaust Tube

Varian VSEA Thermistor Gauge Cable

G2 PROTECTION RESISTOR BOARD

PWBA Gap Servo PCB

SEAL FLIGHTTUBE ISO VALVE

G3 Clamping Source Box

Minus 15KV Decel Resistor Assy

Iso Valve

Transducer Assy Pressure 3000

Pfeiffer Vac Control

Indexer Servo PCB

SEAL TOP BEAMSTOP

Total Energy Monitor

Beam Profiler Interface

MFC Gas Control

200mm Carousel Indexer

Clip Airlines

Orienter Chamber

Axcelis 160KV upgrade Kit

PSU XANTREX 600V 2A BIAS SP

Flight Tube Covers

Tilt Motor

200mm Lift and Rotate Cassette Trays

Feedthroughs & Shims

Scan Flag Block

Carousel Controllers

Robotic Interface PCB

Interlock & Control Interface PCB

Ziatech 8809A

Canon STG-CD PCB

Protection Module

Setup Cup Vac Jig

Multi Rail Power Supply

Filament Power Supply

R-V PCB Three Port Loop Master

Centrifugal Pump

Graphite Beam Stop (NEW)

Source Liners

4650 Z Series Axial Fan

Air Cylinder

200mm Carousel

Line Filter

DAQ Type H

Eaton HVPS Thermocouple Interface PCB

SCREW GRUB

Insulator, Pressure Ring

Leybold EGC 38

Scan Power Supply (PSU)

IS Controller

Linear Motor Servo Controller

MODIFIED VACUUM PUMP

Ribbon Cable

Manifold

Flight Tube

Pneumatics Box Processor