Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

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Extender Card

936-3010

Gate Valve

11210-1003R

Decel Power Supply

E11000290

150mm Carousel Indexer

0040-92282

Floodgun Bias Control PCB

0100-905991

Moving Clip Assembly

10098186

Daq Inverter Extender Card

0270-90070

Dual Bellows Extraction Assembly

0040-95341

6" Flat 0x Wafer On Blade Sensor + Wiring

0020-82873

ASSY 65W XP PSU

0090-91641

AC Line Monitor

0567-0284-000

O RING 85.09 X 53.3 MULTI

3700-90112

EDWARDS GAUGE INTERFACE BOARD

0100-90710

COOLED TUBE ASSY LEAPII

9010-00678

Gas Panel - Carbon Tetrafluoride CF4

9010-02033

Energy Controller

9240-04325

Elevator Control Assy PCB

E15000320

Energy Control Chassis PXP41L

9090-01162

Focus Resistor Clamp

9090-00979

Graphite Shield Target Entrance

E17140800

Arc Volt Controller

0090-90543

DAQ MKII Type B

0090-90966

Digital I/O Assy

E15000031 / E15000030

Electrode

E11029460

CTI 9700A Cryo Compressor

8135916G001

ELMO MOTION CONTROL SBA-10/100H

SBA-10/100H

Flood Gun Power Supply

200011-563 6

Beamline Instrumentation Panel

9090-00926

DE-816TP Ethernet 16-port Hub

DE-816TP

15V DC Stepscan Power Supply

PMC75E-2

C Drive Unit 4600

0906-0108-0001

8 Channel Driver & Monitor PCB

0303-0112

Arm Position Sensor

0090-90983

Beamline Instrumentation chassis

0090-91657

Eaton Beam Monitor Scan Clock Card

0303-0116

Eaton Tilt & Rotate Controller

5990-0130

Edwards STP-XH3203P Turbo Vacuum Pump

YTT55-0Z-005

Clamp Plate

0020-83171

E5 Alignment Fixtures

ENCO 114046

Edwards E6549-003

E6549-003

Dowel Pins

QFT6500183M

Dual Slit Valve

0360X-CA24

Flight Tube

9010-02164

Cryo On Board Interface

8115266G001

DC Motor Drive

0100-91042

DC Servo Motor 1000 Series

1050-04-5000-01

Moving clip assy, 125-150, 0 Deg SPL

0010-99165

Gas Interlock PCB

0100-94102

AMAT Beamline Vacuum Chassis

9090-01201

Eaton Flow Control Source Gas PCB

5990-0050

Dial Gauge

74111374

Eaton Stepper Motor Controller PCB

5990-0048-0004

Ferro Blank

0020-05843

Edwards Vacuum Gauge

D02171000

Eaton Front Panel Control

0567-0196-0001

Extension Lead

262-1154

Fan 9500 PAPST 4214NGN

9600515

Ball Screw Elevator Drive

E17046640

ASSY 24v XP PSU

9090-00033

Eaton Multifunction K6

5990-0013

Liner Graphite Dipol

E17036410

FILAMENT ARC CHAMBER 2.4 PURE

DL63.32.0096.00

Control ChassisFocus Supply + Decel/Focus

0090-91806

CTI ON BOARD 10 CRYOPUMP

8116148G004

Adaptec SCSI Controller

AHA-2940W/2940UW

Dot Two Resistivity Digital Controller

740-A01

Eaton Scan & Chiller PCB

5990-0115

Fixed Clip 300mm

0040-42088

DIP-294-2 Device Net I/O Block

0900-00273

BELT TIMING HANDLER & IMP

3080-90010

Gas box PSU Chassis

9090-01033

Filament Power Supply

1140-00154, 1140-00600, 1140-90182

Flexible Coupling

0760-90008

MRS Assembly

9010-02087

Glassman PCB

PCA1033

E500 Graphite Used In Scanner

E17026680

4650 Z Series Axial Fan

211-9314

Isolation Valve

E11000360

Channel Driver & Monitor

5990-0008-000

Cassette Indexer Jig (Comb to Array)

0270-90179

Implanter Wafer Cooling Test Kit

9240-06830

LINER BASE STD

0020-98916

Axcelis 150/200pc

547932 REV.A

CM 22AWG Power Cable

E118871

DI Water Manifold

9010-01870

Jema Elec I300 Isolation Transformer

I300

Line Filter

FN258P-75-34

Cassette 200mm

0010-92535

Clip Ring CV Mask

00-678599-02

Heatsinks

AMGCOG-211

Contactor Drive Extender PCB

0270-90071

B/L Instrumentation Chassis PX80F

9090-01275

Beamline Exhaust Tube

E78000179

Motor Lift Assy Roplat

E11304631

Chassis Monitor PCB

9090-00145

Indexer Input Cable

X1CP1

BEAM PROFILER INTERFACE BOARD

0100-90286

Die Current Monitor

1070-00026

Beamline Instrumentation Chassis

9090-00695

Index Control

0120-93001