Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

  • 0090-91221
  • 0100-01662
  • 8135903G001
  • 0301-0311-000REV
  • 76.32.0335.00
  • C41401000
  • 0020-32168/B, 0010-10204/B
  • BLF-1011
  • 0010-00685
  • E11001663
  • TPG 261
  • 0090-91806
  • 1140-90180, 1140-90182
  • E15002030
  • E15000031
  • INA ZKLF3080-2RS
  • E10047453
  • 0040-95292
  • 9090-004-101
  • D14641000
  • 76.32.0400.00
  • 0100-905991
  • 0090-91642
  • 0090-91404
  • 0090-90993
  • SL10
  • 9240-03211
  • E11048882
  • 9010-01918
  • E11000142
  • SW0300A01A70000
  • 04-719835-01
  • 9090-00046
  • 0100-00929
  • 0020-98907
  • E11000821
  • 163379-1
  • 0040-95291
  • 0020-87805
  • 1400-90017
  • 0240-61528
  • 0150-95160B
  • 12040-PA24-00
  • STP-600
  • 0010-99165
  • 0090-91694
  • 25/100/21
  • ACA102121000
  • E20000227
  • 8135940G001R
  • 0100-90861
  • 0020-82404
  • TPH 1201PC
  • 0567-0254-000
  • 1166-0022-0002
  • WSR45UM44-C
  • 9150-03125
  • 0910-90094
  • 0567-0039-000
  • 0100-90323
  • 162-031
  • 76.32.0458.00
  • 9010-02032
  • E11304631
  • 0150-92041
  • E15000031
  • 0270-90199
  • 0090-91033
  • 0303-0091
  • 0020-49487/B
  • E11049671
  • 0040-80634, 0720-91547
  • NI100148-2-PN
  • E11000034
  • 0100-00011
  • 0020-82873
  • 10094317
  • 30000217
  • 16008881
  • 10094921
  • 3000099
  • V155
  • 10093839
  • 10094861
  • 4000353
  • 10094825
  • 10095269
  • 10095516
  • V119
  • 10094882
  • V041
  • 10095411
  • 40000357
  • 10094832
  • 30000236
  • 20095236
  • 4000008
  • 16008862
  • 10096047
  • 10095378
  • 10094477
  • 10096232
  • 10095859
  • 10095327
  • 10095484
  • 10095333
  • 0020-41858
  • 4000136
  • 10098117
  • 10096311
  • 10094670
  • 4000132
  • 16022918
  • 4000272
  • 10095100
  • 10098116
  • 16023846
  • 10093947
  • 20095210
  • 10095028
  • 10093957
  • 10095488
  • 10094586
  • 10094020
  • 16024266
  • 30000216
  • 10096389
  • 4000025
  • 20095101
  • 10096201
  • 30000190
  • 16017338
  • 10095085
  • 10095450
  • 10093919
  • 10096251
  • 10094497
  • V227
  • 10095699
  • 10095270
  • 4000177
  • 10093891
  • 4000355
  • 10094657
  • 4000379
  • 10093702
  • 4000316

Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

Source Magnet Power Supply

PWBA BEAM PROFILER MICRCONTROLLER

Cryo Torr Interface

PCB

GUIDE TUBE SIDE PFS

Backing Valve

150mm E Chuck

ISO Valve Bellows

Pneumatic Valve

Vacuum Interlock Extender Card

E500 Cassette Loading Mechanism

Pfeiffer Single Gauge Control

Control ChassisFocus Supply + Decel/Focus

PFS Argon Line

Bias Power Supply

PCB Assy Exhaust Leaker Monitor

PCB Assy Digital I/O

120V Surge Protector

Source Bushing

Exxtraction Assy

Angular Contact Bearing

60KV Mirror Assy

Heatsinks

Master Computer

BOC Edwards Active Gauge

MOUNTING GRN ELEC EXT

Floodgun Bias Control PCB

Rear Monitor & Control

Manipulator Vac Can

Abb Contactors A30

Assy 45w-5v-XP PSU

Piping Attachments

Glassman Hi Voltage PSU + Decel Control Chassis

Wave Guide Cooling Plate

Turbo Pump Controller

Puls SL10 Power Supply

Axsys Direct Drive spin motor

Misc Cover Plates

GUIDE TUBE SUPPORT

Scanning Faraday Controller / Rotating Platen Controller

Moving Clip Assy 200MM Quantum

Analyzer Magnet PSU

BNO Microcontroller

Flex Tube Assy

Source Magnet Power Supply

I/V CONVERTOR BEAM PCB

Source Handles

Left Elevator Controller

Utilities Manifold

STL Three Phase Transformer

Heatsinks

Focus Lens Housing

SENSOR LED EMITTER WAFER ON BLADE

RESOLVER ASSY COMPACTSCAN

CFA Bulgin PSU Output

Beam Stop Flowmeter

ISO Valve

STP Controller - STP600

Moving clip assy, 125-150, 0 Deg SPL

Beamline Power Distribution

Step Scan Mains Line Filter

Cassette Indexer Kit

Flight Tube

SIF 4

Edwards iXH100 HV

Fibre Optic Unit

CTI IS-1000 Compressor LV

MRS Box

Spin Scan Detector

9500 BEAMSTOP LINER 3IMP4

Pfeiffer Vacuum Turbo Pump TPH 1201PC

Source Term Data Link

Data link Assy Magnet Term

Power Supply

Extraction Clamping Box Input Cable

125V/2A

Tilt & Rotate Cont 24v

Tilt Angle Control PCB

MVME 162-031

SHIELD GRAPHITE POST MRS SLIT

Exhaust Connectors

Extraction Vac Can

Gas Panel - Carbon Dioxide CO2

Motor Lift Assy Roplat

13A Bulkhead Cable Set

I/O Digital Multi PCB

Beam Align Profile

Electrostatic Clamp Controller

Linear Transducer

200KV Stack

Cassette on Tray Brackets

Eaton Scan Generator

Electde Focus Twin F/Thro R340

Target Focus Faraday Assy

IHC Upgrade Kit for Quantum III (9240-03749)

PFC EXT Power Supply

Filament Power Supply

Chopper Drive

6" Flat 0x Wafer On Blade Sensor + Wiring

X5FA.P10/X5F.P3

  • 0090-93106
  • 0600-90034
  • 0020-97557
  • 9010-02762
  • E11000092
  • 1140-00248
  • 0020-98908
  • 9090-00803
  • 42749-4011
  • 0010-92170-ITL
  • E15000041
  • 0090-91557
  • 00-678274-01
  • E15000080
  • 0090-91030
  • 5990-0013
  • PAA300F-24
  • 0090-91818
  • 1080-00069
  • 0020-98916
  • 8250HT
  • 1140-90090
  • 0040-95888
  • 0100-99011
  • Y266215A
  • E11035771
  • 9010-00729
  • 0210X-CA24-BCU1
  • 0342-1429-0002
  • 0100-90469
  • 800075V0005
  • SBA-10/100H
  • E42000096
  • E11001622
  • 0090-91558, 0090-91557
  • 8501314000
  • E19002300
  • 0090-91859
  • E19000800
  • 9090-91685
  • 0010-91962
  • 9090-00100
  • 9090-00104
  • 0040-93833
  • A1015850
  • 9010-00081
  • 9090-00626
  • 188859
  • 0150-97070
  • 0100-90183
  • 0090-91917
  • 9090-01331
  • 9090-00801
  • E6549-003
  • 1140-90164, 9090-00801W
  • 00-682216-00
  • 0020-24067/A
  • 0020-25609
  • 0020-80618
  • 9090-00846ITL
  • 0090-91689
  • 0040-45804
  • AP2611365
  • 0100-90945
  • 0270-00296
  • E31000148
  • 76.32.0397.00
  • E11007224
  • 0010-92515
  • E15000110
  • 7408-14H
  • 0090-91890
  • E17036410
  • E11033360
  • 1080-90047
  • E11001000
  • 10095170
  • 16024093
  • 16008849
  • 10094824
  • 4000352
  • 10095695
  • 10096328
  • 16023718
  • 20095106
  • 10094523
  • 4000147
  • 10094868
  • 10097036
  • 10095591
  • 10094092
  • 16016636
  • 10098049
  • 10096374
  • 10094971
  • 10094778
  • 10095532
  • 10095288
  • 4000064
  • 10095360
  • 10095089
  • 10095815
  • 10095263
  • 10095233
  • 10094419
  • 10095762
  • 16024059
  • 10094442
  • 4000122
  • 10096215
  • 10098098
  • 4000318
  • 10094416
  • 10095799
  • 10095485
  • 10096028
  • 10095548
  • 4000356
  • V009
  • 10094031
  • 10098136
  • 10093995
  • 10094700
  • V046
  • 30000562
  • 10095578
  • 16016774
  • 10095658
  • 4000289
  • 10098097
  • 10095681
  • 10094567
  • 10095710
  • 10095084
  • 10095004