Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

481528
0100-00415
0100-00520
5990-0130
PEIFFER TCP1
0150-94651
0090-91462
0020-98917
0660-90052
0020-81482
8452-0007-0001
0020-86823 0020-86824
9090-00145
9090-00033
E11092037
STP-600
0040-97140
8113042-G002
IQ-1000
9240-05606
E11038421
AHV-PG-1-180P
140P
0150-94646
SBA-10/100H
0270-90203
RG-58/U
E33000182
3122-0007-0001
0140-91186
E11059714
NI111657-0
E11048881
0090-90388
0150-90163A
104854001
5990-0006-000
1140-00151, 1140-00599
E12000810
PMC75E-2
43510-00
1140-90179
E19007540
M-1025R
E17120450
E18010570
0567-0205-000
0100-90485
0090-90983, 9090-00099, 0090-91664
0010-92514
04-709847-00
0567-0302-000
E17041712
3030-18908
E11001060
0567-0091-300
1140-00165
9090-01127
262-1154
0567-0240-000
0240-91922
9010-00701REV
DL63.32.0096.00
271313D
0100-91086
0150-95169
BX2-8/6-01-A
E40000907
0100-91095
E11000821
3700-90003
0100-90891
5990-0027-000
PV40PKA DBL-B
0342-0982-4001
00-680616-00
0090-91641
PW9125 3000VA
E15000031 / E15000030
0100-90077

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10095332
4000400
10094792
10096354
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4000313
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V228
10094585
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4000277
30000185
4000061
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V173
10093796
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30000202
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20095165
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30000215
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10095260
20095081
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16016629
30000524
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10094060
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16008876
30000205
10094133
10096372
16023954
4000299
V051
10095491

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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

ESS Magnet Power Supply

Anti Latch PCB

Tetrode Diver Board

Eaton Tilt & Rotate Controller

Resolver Aperture Turbo Control

X5FA.P16/X5F.P2

Vacuum Gauge Control

LINER SIDE

MVME 335

ANTICATHODE BERNAS

Eaton Beam Monitor Comm Card

Decel Ground Bar

Unit 1600 Autocool/Watercool Chassy

PFS Chamber Liners

Wafer Handling Effectors

Chassis Monitor PCB

ASSY 24V 60W XP PSU

Source Bushing

COMPUTER ASSEMBLY, CONTROL

Leak Check Port

SEIKO SEIKI STP-600 Turbomolecular Pump

Plasma Flood Chassis

CTI Onboard Fast Regen Module

Accel Column

Sensor

ARC & FIL CHASSIS BULGIN RETROFIT

Smoke Detector

Power Supply Accelerator Column

Litrex Inkjet Printer 140P

Iso Valve Seal

X5FA.P5/X5F.P9

Rev B Motion Control PCB

Window

Beam Align Profile

Coaxial Test Cable

Cold Cathode Vacuum Gauge

Unit 4500 Relay Interface Chassy

X4F.P9/X3B.P4/X3A.J10

200mm SI Cooled Platen

Filament Power Supply

Linear Transducer + Plate

Platen + Faraday Control

Graphite Box

Gripper Box

OL6000 60kV Stack and Pre-Accel Converter

BNC Cable Assy

PCB Assy Light Link Interconnect

Beam Monitor Comm PCB

ARC Power Supply

Pitman Motor

Cosel PMC75E-2 Power Supply

Genus PSI Extender PCB

Hivolt 1000 Series Power Supply

50V Specific Silicon Pro Visiion

Scan Tranducer Assy

MRS Pre Defining Aperture With Graphite

Graphite

Graphite Shield (T/C Side)

Ergo Turbo Lift

Scan Generator

Orienter Control PCB

Arm Gripper Controller

Gas Panel - Arsine AsH3

Set Up Jig

Bearing Seal Assy

Scan System II PCB

Eaton Fiber Optic Convertor

200mm Roplat Silicon Coated Adapter

MFC 5SCCM AR VCR 1/4 AUTO SHUT OFF

Linear Motor Servo Controller

Load Lock Filter

Magnet Power Supply Regulator Texion

AMAT Decel Power Supply

Vacuum Robot Amplifier

Extension Lead

Beam Shutter Interface

HD PFS

Extraction Clamping Box

FILAMENT ARC CHAMBER 2.4 PURE

Remote Power Supply

PWBA PLASMA ARC CURRENT

X5A.P14/CSI.J1/PSI.JI,J2

BX2 Controller 8 Axis

Spacers

Pneumatics Control PCB

Left Elevator Controller

Vac Chamber Hardware

O RING FLIGHT TUBE QUICK CONNECT

Spin Control PCB

Scan Monitor & Chiller Interface

MRS Exhaust

Vaporizor Power Supply

Blank Off, Source Flange

ASSY 65W XP PSU

Eaton Powerware Online Rack/Tower

XCE.P2/X6C.P4

Digital I/O Assy

Extender PCB

Gas Vacuum Line

Thermistor Gauge Controller PCB