Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

04-707985-03
A1015850
9090-00049
E15004521
0342-0384-100
9090-01059
0100-90967
0040-96525
E118871
0567-0232-000
9010-01506
0040-51795 RE
1140-00152
30019
9090-00801
9150-03920
E11001040
0090-91640
E16008960
0342-1432-0001
0100-00986
YTT55-0Z-005
0342-0562-200
0090-93027
E11005430
0010-92438
0100-90831
AMGCOG-211
0020-99455
0261-0003-0003
0020-85167
3019HA03
0270-90201
0015-02113
SERVOSTAR620
9090-01415
0567-0229-000
E11000090
0100-90790
GF125CXXC
C800-65/65CSCR
PM P04 423 B
TMU260
3080-90010
76.32.0341.00
926105
0342-0934-300
9090-00801
9010-01870
3700-90004
0020-82832
0190-90279
3700-90245
PM 051 104 -T
0020-06274
MRCFAL7831500
04-715865-01
DL50-A-814
3930-99002
E11001051
9010-02033
PS/ER06N50.O01
568-5531
9090-01033
E11000090
0020-82934
0040-99208
E11053620
0010-99078
1140-00254
0100-90385
SP25K
E11029490
E11048881
1080-00033
11000034
DE303
PC834-001-N
0010-99113
1140-00109

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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

Magnet Assy

160KV Stack

QUANTUM PC

PCB

Supression Feed Through

Ultra Clean Air System Chassis

Beam Line Inst M/Board

Fixed Restraints

CM 22AWG Power Cable

PCB

WAFER ARM DRIVE ASSY

Source Bushing

Exhaust Ports

Feed Through Kit

Bias PSU

AUTO TRANSFORMER

80KV Stack

PFS Cable Kit

Accel Suppression Power Supply

DI Lines + Fittings

ASSY 45W XP PSU

ION Source Vac Can

Light Link Cable 1U

Filament Supply Assy MOD DTC

SDS GAS INTERLOCK

DI Filter

Edwards STP-XH3203P Turbo Vacuum Pump

Source Can

Power Supply

Scan Generator Controller

Cooling Flange

ASSY MERC SHFT & SEAL DD VA

Scan Clock PCB

Pfeiffer TPS-201

Heatsinks

FLIGHT TUBE OUTER INSERT

Unit 5600 Beam Current Amplifier

FINGER SHORT GRIPPER

Pen Display Monitor

Cable Kit / Direct Drive

Dual Bellows Extraction Alignment Jig

DELTA TAU PMAC 1 ATMOS VME PCB

Step Scan AMP

PFS Control Chassis PXP29C

PCB

Quad Magnet Power Supply

Arm Position Sensor PCB

Mass Flow Control Valve GF125CXXC

Varian Alum-A-Lift

Light Link Tester

GLASSMAN HIGH VOLTAGE

HiPace 1200 U

Pfeiffer Turbo

BELT TIMING HANDLER & IMP

SCREEN SIDE ENTRY TUBE PFS

Serial Later Face Driver

Shield Assy

15 Kv Decel Power Supply

6 Kev Pre Accel Power Supply

DI Water Manifold

O RING 0.674 X 0.103 MULTI VIT

BEAMSTOP GRAPHITE

AMAT 9500xR Isolation Transformer

Isolation Valves

O RING 5.7 X 104.3 MULTI

Vac Cable

NUT ELECTRODE G2 (NEW)

Water Manifolds

Source

Copper Target

Shield Cavity 6

Clip Ring CV Mask 6"

Controller Pneumatic Processor

Platen Tilt Servo Controller

Misc Spares 1 Box

Gas Panel - Carbon Tetrafluoride CF4

Network Hub

High Voltage Decel PSU 6KV

Hitachi Sense PCB

Gas box PSU Chassis

Quad Magnet Power Supply

Scan Arm Hard Stop 9500

Extended Source Housing Chamber

PFS Feedthrough Plate

BEAMSTOP KIT

Implanter Wheel - 200mm (Non Populated)

Hall Probe Amplifier

ASSY FLT TUBE W/DUMP MARK II

ESS PSU 80V 185A 15KW DUAL

Contactor Drive PCB

Edwards Speedy Valve

Faraday Set-Up Assy

Scanning Faraday Controller | Rotating Platen Controller

Quad Rotate Gripper Motor

Dual Vaporizer

Processor Window (375 x 325 mm)

Interface Server

Servo Drive

Hollow Gripper 8" 200mm

PSU G1 6KV