Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

X Clear Search

Lens Magnet Power Supply

E11000142

Magnet Control

0090-91818

N Port Interface Server

NPORT5610-16R

AMAT xR80 STL Transformer

1360-90103

Gas Box Controller

0090-91890

Blade Drive Motor + Ferrofluidic

URDM5913/50

Fixed Restraints

0040-96525

Beamline Soft Start Unit

EN60947-4-2

Optical Encoden Assy

E19002300

LINER SIDE

0020-98917

Cable

0150-97149

Magnet Power Control Chassis

9090-00086

Manifold Leak Check Assy

E17053101

Filament Power Supply

E19000431

O RING 3.53 X 107.54 VITON

3700-90122

BEAMSTOP GRAPHITE BLOCK 3 POS P'KIT

76.32.0391.00

Flex Tubing Assy

28-200704-00

Cassette Alignment Kit

0250-90453

Ceramic Insulator

04-719079-01

ARTESYN PSU

1140-90090

ASSY 24V 60W XP PSU

9090-00033

Blank Off Assy, Shipping, Accel Column

E18001072

Brooks Automation Controller

307254

FERROFLUIDIC SEAL 3/8 Shaft

3700-90309

Moving Clip Assy 200MM Quantum

9010-01918

Manipulator Assembly

E17001750-8

9500 150mm Wheel

150mm Wheel

AWM 2919

E108998

Modified Power Cable

E16134300

Filament Power Supply

NI111657-0

Graphite Shield (T/C Side)

E17120450

GRAPHITE GUIDE TUBE SIDE PFS

76.32.0334.00

Bracket

E18006390

BEAMSTOP GRAPHITE

0020-82832

Assy 200mm S.I Multi

E11007224

Cryo Power Cable

8112463G200

NUT ELECTRODE G2 (NEW)

0020-06274

Graphite Lens Liner

E17036400

GAUGE VACUUM 1MTORR 0-15VDC NW16 PLATINU

3310-00229

NIB Controller Assy Servo Orienter

E11001411

Beam Profiler Microcontroller PCB

0100-90287

BX2 Controller 8 Axis

BX2-8/6-01-A

Beam Align Profile

0270-90199

Atmosphere Robot

0520-00062

Gas Interlock PCB

0100-99011

Beamline Main Power Supply

9090-00846ITL

Ferrofluidic

E19000240

Beamstop Graphite

1031291-0067

Graphite Beam Stop (NEW)

0020-99637

Ground-Foss Pump Shaft Seals (4 Off)

985167

Graphite Scanner

E17026690

Options Chassis

9090-00101

Gas Panel - Arsine AsH3

0010-92514

Bel Power Solutions Power Supply

HE12-10.2-A

BNO Microcontroller

SW0300A01A70000

Koll Morgan Carriage Motor

E19006050

Gauge Control

D04847000, D38661000

AUTO TRANSFORMER

30019

Carousel Relay Control

9010-00069

Asyst Moca Clear Versa Port

9700-6017-02

9500 BEAMSTOP LINER 3IMP4

0020-82404

CHAMBER ARC

76.32.0347.02

Front Panel Control

0569-0196-000

Arc Discharge Power Supply

0342-1431-000

Bearing Seal Assy

04-709847-00

Magnet Power Supply

0342-1429-0002

Bellows X Seal Assy

04-710424-01

BUSCH BC100 Cobra Vacuum Pump

BC0100A

NC Shield

04-714049-01

Mass Flow Controller Low Pressure BF3 5SCCM

E23000636

G2 SERIES PROTECTION RESISTOR

9090-00659

Data link Assy Magnet Term

1166-0022-0002

FWI Sensor

9010-00081

Front Panel Controller

0567-0195-000

CTI Onboard Fast Regen Module

8113042-G002

BNC Cable Assy

0150-90163A

GAUGE ION (VARIAN 160/10 SPA

5300019

Beam Monitor Back Plate

0567-0241-000

Orientor Lifter Controller

E11001690

Fixed Clip

0040-45804

G3 Clamping Source Box

9090-01326

ARC VOLTAGE CONTROL BOARD

0100-90930

BATTERY B/UP ASSY STD

9090-01165

ASTEC Power Supply MP4-2L-00(-533)

73-540-5033

Minus 15KV Decel Resistor Assy

0090-91484

Genus GPI Extender Card

43057-00

GA CLIP ACTUATOR DRIVE ASSY

9010-00729

Analyser Magnet Power Supply

481528

Master Computer

9090-004-101

BX300 Controller (8 Axis/3 Drives)

100-000-943

Focus & Deflact Interface

5990-0150

On-Board IS-8 Cryopump

8185247G001R

ARC & FIL CHASSIS BULGIN RETROFIT

9240-05606

Beamline PSU Chassis

9090-00626

FILTER DEIONIZING

4020-90026

GUIDING TUBE PCB

0110-91085

CTI Network Control

8113052G003

PCB Assy Control BD Multi Vac

E15002390

Beam Current Measurement Module

9090-01047

MOUNTING GRN ELEC EXT

76.32.0400.00