Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

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Blank Off, Source Flange

00-680616-00

ARC VOLTAGE CONTROL BOARD PCB

0120-93701

Pitman Motor

E12000810

Controller Pneumatic Processor

3930-99002

Clamp, filament, R/H

0040-94018

GATE VALVE LINER, CLAMP PLATE

0020-83172

CLIP ASSM WHEEL

0040-94763

Gas Panel - Boron Trifluoride BF3

0060-90271

Cryo Torr Interface

8135903G001

BOC Edwards Active Gauge

D14641000

Analyzer Magnet

37558

Clamp, filament, L/H

0020-81227

Cable

9150-04108

Air Cylinder

00-678319-01

Chamber Aperture

0295-0006-200

Front Panel Control

0567-0196-000

Flat Aligner Interface PCB

36-0132

Assembly Moving Clip 200mm

0010-99166

Chopper Drive

0100-00011

PCB

0301-0300-000REV

Mounting Supp Elec Ext

76.32.0397.00

Cassette 6"

00-681359-00

Cold Cathode Gauge + Manifold

525

Extraction Manipulator Controller

E11005060

ASSY HD PFS HEAD QUANTUM

0240-61414

Beamline Vacuum Control Chassis

9090-00456

HiPace 300 Turbo Vacuum Pump with TC 400 Controller

PM-P03-900

Blade

9010-013272

Gas Panel - Germanium Tetrafluoride GeF4

0060-99022

On-Board IS-250FE Cryopump

8185249G001R

AMAT Decel Power Supply

1140-00165

Blanking Plate

E500

MRS Turbo

TURBOVAC340M

Brake Actuator Assy

E11087520

Assy Power Supply Message

0090-91030

Assy 45w-5v-XP PSU

0090-91642

Beam Profile Setup Jig

0270-00337

Arc Control DSP

9090-00976

Data link Assy Magnet Term 6200 A/AV

1166-0002-0002

Area Flow Meter

FC-2600

PCB Sub Assy Dose Controller

E112321003

Gas Panel - Silicon Tetrafluoride SiF4

0010-92515

GASLINE ASSY,INSULATED

DL30.32.0494.00

Beam Profiler Interface

0100-90286

MVME 335

0660-90052

Electromagnetic Coil

25725

Filament Power Supply

0342-1432-0001

Multi Rail Power Supply

0090-91841

FI Ionisation Controller

5024E

Ceramic Blade

0020-82890

Focus Decel Control + Power Supply

1140-90129

Gas Flow Control PCB Assy

E15000190

CRYO GATE VALVE 4699874-0001

3870-90302

Genus PSI Extender PCB

43510-00

Beam Shutter Interface

0567-0240-000

Glassman High Voltage 20KV

PS/NVQ20PN15

Graphite Beam Stop (NEW)

0020-99636

Drying Controller

GB24734-001-001-02-05

Beam Profiler Mico Controller

0100-90970

9500 Source Cooling Tube

0040-99120

ASSY TETRODE ION

0010-93173

Cassette Tilt Bracket (Left and Right)

E11001669

Cold Cathode Vacuum Gauge

E33000182

LTH Resistivity Monitor

DCD23

Cable Assy

E16030733

Ceramic Insulator

00-682884-00

Spin Motor Ferro-Fluidic Seal

WHIM Exchange Arm

0090-93105

Implanter Wheel - 200mm (Non Populated)

Part 0090-90519 / 0090-90520

0090-90519 / 0090-90520

Part 0090--91193

0090--91193

Part 1012-5027

1012-5027

Part 0090-91639

0090-91639

Part 0090-91123

0090-91123

Part 1140-90182

1140-90182

Part 0342-1431-0001

0342-1431-0001

Part E19000092

E19000092

Part 0090-90707

0090-90707

Part 0500-00221

0500-00221

Part REVO RCL063

REVO RCL063

Part 0090-90378

0090-90378

Part 0090-91469

0090-91469

Part REVO RCL062

REVO RCL062

Part N-FE11005383

N-FE11005383

Part 9090-00047

9090-00047

Part PAT04042

PAT04042

Part 9090-00958

9090-00958

Part 0090-91796

0090-91796

Part AdTec RF Generator

AdTec RF Generator

Part 0090-91071

0090-91071

Part 0090-91044

0090-91044

Part 0090-93107

0090-93107

Part 0090-91135

0090-91135

Part 595-1711-02

595-1711-02

Part 0090-91591

0090-91591

Part 0090-90228

0090-90228

Part 370798503

370798503

Part PS/ER06N25

PS/ER06N25

Part 0090-91154

0090-91154

Part 0090-93099

0090-93099