Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

3310-90003
1027-0076-0001
0020-98914
8185305G001R
80432026002
9090-01144
E17001750-8
0520-00062
481166
0342-0838-400
CPP300PS24
LMD-1040XC
E11003710
0620-02088
0100-91105
54-0141
9090-00397
0100-90710
04-712167-01
1360-00103
ENCO 114046
0100-90630
E19002171
0100-94029
C31315000
E16001063
1140-00109
0600-90083
3700-90349
0020-82644
0980-0081-000
11452001
0150-94838
300-003-873
0090-93095
0040-94792
E19002721
PV25PKA-DBL-B
ATD4020
E23000001
DE-816TP
9090-90250
INR-498-003B
9090-01393
9100C24P3
00-682884-00
I300
0100-90944
1080-00014
ISUS1026
9700-6017-02
5075-90163
9090-00086
E113434001
0100-90679
73-540-5033
9090-00097
9240-04325
0100-00985
X1CP2
E11092037
E17046640
04-710446-06
E16030733
2400113
5990-0055
E11134160
150mm Wheel
E36000031
0090-93099ITL
9090-00630
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5990-0003-000
0342-0978-0007
9090-00239
C01-6300
5990-0086-000
0100-90025

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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

GAUGE VACUUM 572 KF25

TM 22 Vacuum Gauge Display Unit

REFLECTOR FILAMENT

On-Board IS-320FE Cryopump

Cryo Compressor Controller

Laser Controller Handling

Manipulator Assembly

Flood Gun Fit

Atmosphere Robot

ESS Power Supply

Scan,Amatic Relays

Beam Guide

Pipes

24V AC 14A Stepscan Power Supply

Sony Monitor

Vacuum Gauge Control

CA PX75D.O-P/PX75E.

Wafer Loader Valve Seat

I/V Converter Power Supply Board

PCA Motor Drive DC Servo

Hi-Voltage 80kV Stack

EDWARDS GAUGE INTERFACE BOARD

Spring

Transducer Plate

STL Stewart Transformers 26kVA Transformer

E5 Alignment Fixtures

General Extender Card

Atmosphere Switch

Scan Arm Ferro-Fluidic Seal

R-1 Supression PSU

ARC VOLTAGE CONTROL BOARD

Valve

Harness Linear Motion Servu

Hivolt 1000 Series Power Supply

Loop Controller

O-RING 1 78D 3 68ID SILICONE

MRS Turbo Clamp/O Ring

Cold Cathode Gauge Cable

Vaporizer Power Supply

Analyzer Magnets Eaton

X5A.P12/X2A.P13

Power Distribution Box

Spin/Scan Interface

200mm Indexer Conversion Bracket

Plasma Flood Supply

Exhaust Baffle

MRS Turbo Backing Valve

Vacuum Gauge

Transformer 120/12V

Cold Cathode Vacuum Gauge

DE-816TP Ethernet 16-port Hub

Wafer Arm Servo and Power Supply

Thermo Chiller

Loop Controller PXP41W

Ion Source Controller IHC

Proteus Flow Meter

Ceramic Insulator

Jema Elec I300 Isolation Transformer

Manifold Attachments

AMAT Vacuum Gauge Control

Wafer Arm Gripper Interface PCB

Transfer Arm Motor

Phantom Specter RS232

PT VME 330A

Asyst Moca Clear Versa Port

Software Tape

Magnet Power Control Chassis

CRYO PUMP N2 PURGE

Vaporizer Control

Arc Voltage Control

ASTEC Power Supply MP4-2L-00(-533)

Beamline Instrumentation Chassis

Energy Controller

HP Gas Interlock PCB

Indexer Input Cable

R-A OR E500 Computer

Lifting Aid Kit

Ball Screw Elevator Drive

ViPS Can

Cable Assy

GSD Transformer

HVPS - Termocouple INTFC PCB

Glassman Hi Voltage Power Supply

Flood Gun Gas Feedthrough

Source Magnet Coils

Source Magnet Polarity Switch

9500 150mm Wheel

Shorting Bar

Spin Scan Control

Remote CPU

Process Chamber PFS Feedthrough Kit

Fibre Optic Controller

Unit 900 Scan Amplifier Assy

Ground PSU Chassis

MRS Bushing

Scan Drive

Z Bot 2

Terminal Earth Piston

Scan System II PCB

24v DC Power Supply