Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

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Part NHRR 01001k-L05E1M01

Part 0906-0146-0001

Part 0090-91093

Part 0342-1429-0001

Part 0342-1056

Part E11000080

Part SERVOSTAR610

Part LSA800

Part 9090-01247

Part 1140-98035

Part 9090-00115

Part 04719414-01

Part 9090-00067

Part 5980-0051-0001

Part 9090-00586

Part 0090-91621

Part RF GENERATOR

Part 1014-5102/5202

Part PS/MK20P03.7

Part 0090-93034

Part 3122-0004-0001

Part 3122-0001-0001

Part 0906-0110-0001

Part E04705185-03

Part 0010-00069

Part 9090-00186

Part RM4U-SX1500

Part 1100-5114

Part 0090-00115

Part 0090-91209

Part PS/KA-HP996

Part 0090-93091

Part REVO RCL065

Part 603-3046-02

Part E101927002

Part 9090-01057

Part PC834-001

Part 0090-91558

Part 0090-900979

Part 0090-90109

Part 0090-90555

Part 4240-00579

Part 0090-91132

Part MAC112A-0-VD-4-C

Part 0240-96153

Part 9010-00701

Part ADVANCE HIVOT

Part E19000090

Part 906042

Part 0090-91251

Part 0090-91465

Part 0090-91159

Part NP13TFDMCH

Part 1140-00057

Part E11000820

Part 2000961

Part 1027-0072-0001

Part 9090-00386

Part SERVOSTAR614

Part Aerotech 4020

Part 0090-91415

Part 0090-91698

Part PS/KL030N100YU6

Part E11000211

Part 9090-90979

Part LF24 / A48019

Part PX13C

Part 0090-91494

Part 9090-00036

Part 3122-0003-0001

Part PS/EK20N25

Part 0090-90876

Part 0090-91264

Part 0090-99037

Part HEOS-828B-SD

Part 4708211

Part PS/KA-PG-DRIVER

Part E11021380

Part 9090-00846

Part 0090-930245

Part 600-3928-01

Part 347823-9015-010

Part 0090-91473

Part 0090-91062

Part 0090-91927

Part 0090-91332

Tilt Drive Assy 0-7 Deg

Alum-A-Lift Scan Motor Lift

Fibre Optic Test Kit

Cosel PAA300F-24 AC-DC Regulated Power Supply Module

Data Acquisition Type B PCB

Bushing

Plasma Flooding Assy+Transport Box

DAQ Power Supply

Isolation Valve Source

Canon BG9-3719 BH8-0682-02 IME-IF

Cooling Line

Kit Leak Test Ports

Linear Transducer + Plate

MRS Pre Defining Aperture With Graphite