Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

  • 0906-0110-0001
  • E04705185-03
  • 0010-00069
  • 9090-00186
  • RM4U-SX1500
  • 1100-5114
  • 0090-00115
  • 0090-91209
  • PS/KA-HP996
  • 0090-93091
  • REVO RCL065
  • 603-3046-02
  • E101927002
  • 9090-01057
  • PC834-001
  • 0090-91558
  • 0090-900979
  • 0090-90109
  • 0090-90555
  • 4240-00579
  • 0090-91132
  • MAC112A-0-VD-4-C
  • 0240-96153
  • 9010-00701
  • ADVANCE HIVOT
  • E19000090
  • 906042
  • 0090-91251
  • 0090-91465
  • 0090-91159
  • NP13TFDMCH
  • 1140-00057
  • E11000820
  • 2000961
  • 1027-0072-0001
  • 9090-00386
  • SERVOSTAR614
  • Aerotech 4020
  • 0090-91415
  • 0090-91698
  • PS/KL030N100YU6
  • E11000211
  • 9090-90979
  • LF24 / A48019
  • PX13C
  • 0090-91494
  • 9090-00036
  • 3122-0003-0001
  • PS/EK20N25
  • 0090-90876
  • 0090-91264
  • 0090-99037
  • HEOS-828B-SD
  • 4708211
  • PS/KA-PG-DRIVER
  • E11021380
  • 9090-00846
  • 0090-930245
  • 600-3928-01
  • 347823-9015-010
  • 0090-91473
  • 0090-91062
  • 0090-91927
  • 0090-91332
  • 0010-91582
  • PAA300F-24
  • E11037750
  • IES003096
  • IES002935
  • IES002793
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X Clear Search

Part 0906-0110-0001

Part E04705185-03

Part 0010-00069

Part 9090-00186

Part RM4U-SX1500

Part 1100-5114

Part 0090-00115

Part 0090-91209

Part PS/KA-HP996

Part 0090-93091

Part REVO RCL065

Part 603-3046-02

Part E101927002

Part 9090-01057

Part PC834-001

Part 0090-91558

Part 0090-900979

Part 0090-90109

Part 0090-90555

Part 4240-00579

Part 0090-91132

Part MAC112A-0-VD-4-C

Part 0240-96153

Part 9010-00701

Part ADVANCE HIVOT

Part E19000090

Part 906042

Part 0090-91251

Part 0090-91465

Part 0090-91159

Part NP13TFDMCH

Part 1140-00057

Part E11000820

Part 2000961

Part 1027-0072-0001

Part 9090-00386

Part SERVOSTAR614

Part Aerotech 4020

Part 0090-91415

Part 0090-91698

Part PS/KL030N100YU6

Part E11000211

Part 9090-90979

Part LF24 / A48019

Part PX13C

Part 0090-91494

Part 9090-00036

Part 3122-0003-0001

Part PS/EK20N25

Part 0090-90876

Part 0090-91264

Part 0090-99037

Part HEOS-828B-SD

Part 4708211

Part PS/KA-PG-DRIVER

Part E11021380

Part 9090-00846

Part 0090-930245

Part 600-3928-01

Part 347823-9015-010

Part 0090-91473

Part 0090-91062

Part 0090-91927

Part 0090-91332

Tilt Drive Assy 0-7 Deg

Alum-A-Lift Scan Motor Lift

Fibre Optic Test Kit

Cosel PAA300F-24 AC-DC Regulated Power Supply Module

Data Acquisition Type B PCB

Bushing

Plasma Flooding Assy+Transport Box

DAQ Power Supply

Isolation Valve Source

Canon BG9-3719 BH8-0682-02 IME-IF

Cooling Line

Kit Leak Test Ports

Linear Transducer + Plate

MRS Pre Defining Aperture With Graphite

Graphite

Focus Electrode + Ground

Gripper Parts Kit

Alcatel and SPTS Parts Listing

PA Faraday Cage

E11037750

Filter Housing Handle

Cleanroom PC

Minus 15KV Decel Chassis

Assembly Carrier

AMAT PCB

Focus Faraday Vac Can

Contactor Chassis

Cryo Leak Check Flange Kit

Argon Purge Module

Barrier

Gas & Temp Chassis

Focus/Deflector Power Supply

Flat Orienter Assy 150mm

Manipulator Graphite Kit

Blade Drive

Bushing Supports