Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

0100-90479
0100-90503
0100-90666
5980-0059-0001
0020-84799
E19003380
0240-97545
E11037340
0190-40545
E22000005
10246-0301
600-3492-01
E17013130
112212002
0270-90074
0303-0055
9090-00809
8113052G003
1400-90016
9090-01499
0090-93111
5075-90163
9090-00926
E15004390
5990-0115
0240-91623
0150-90834
NT340M
E108998
1360-90103
9090-01275
E15000204
3122-0009-0001
0190-12160
NI070135-0
1140-00599
9010-00456
760-500-G8
1140-90164
0660-90052
E500
0010-20441
0100-40077
0100-90093
M3402
9090-01201
1140-00154, 1140-00600, 1140-90182
STP-h1000c
0250-90453
1140-90109
3020-90035
76.32.0336.00
0100-00559
04-712186-01
0240-61574
E11003061
936-3010
1140-90189
1000900
9090-01356
9240-04902
0090-91158
E11373450
9090-00473, 9090-01265
ISUS2022
E11001632, E110016333
9090-00732
1050-04-5000-01
BG4-6634 BH8-1831
9240-06830
8112463G200
E16134300
E19000240
9090-00961
3700-01007
E11000351
0090-00342ITL
E23000636

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4000153
16016721
10094113
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10095030
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3000095
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V132
V032
V153
16008897
10095617
10094637
10094807
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4000201
20095061
10095467
10093999
20095000
10094048
10093942
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10093990
4000280
10094836
10095188
10095021
V165
10095285
20095071
16008878
10094811
10094411
10095669
V054

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Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

Vacuum Interlock

Index Control PCB

Beam Profiler Microcontroller PCB

Accel/Decel Power Supply

Cryo Torr Interface

Baffle Turbo Source

Six Phase Generator

PSU ASSY 45W XP 9500 IMPLANTER (Repair)

Accel Column

MOTECH PSU MP80

Glassman P.S PS/MK30P 025

Heat Exchanger

Setup Jig

GSD200 Sun Sparcstation 5 PC

Right Hand Orient Sensor

X Site Assy 200mm

4 Phase Stepper Extender Card

Eaton PCB

Controller

Ground Pneumatic Rod

CTI Network Control

SENSOR LED DETECTOR WAFER ON BLADE

QUANTUM PC

24V 65W XP PSU

Software Tape

Beamline Instrumentation Panel

PCB Assy Terminal Controller

Eaton Scan & Chiller PCB

Source Bushing

TRANSZORB - POST TO GROUND

Turbo Pump Controller

Ground Suppression Power Supply

AWM 2919

AMAT xR80 STL Transformer

B/L Instrumentation Chassis PX80F

X PCB Assy M Control

Pneumatic Processor

Unit 4700 Endstation Interface Chassy

Remote Display Keypad Module

A-Mag Power Supply

Main Shaft Blank

ARC PSU XANTREX 120V 10A

Electrical Feed Throughs

Hollow Gripper

Suppression PSU Power Cable

KIT SHIELD QUARTERLY

Desposition Controller IC/5

Power Supply Tetrode

VME Module

Blanking Plate

RF MATCH, PVD 6"

THERMISTOR GAUGE CONTROLLER

Ion Gauge Power Supply

SSEC Etch Processor

AMAT Beamline Vacuum Chassis

Filament Power Supply

Turbo Controller Seiko Seiki

Lift & Rotate Controller

Cassette Alignment Kit

LMAA

PSU 300W 48V 6A 47-63HZ - VI MU4

Shorting Bar

GRAPHITE GUIDE TUBE TOP PFS

Source Magnet Control PCB

Wafer Loader Isolation Valve

Ram Pad Collar

Heat Exchange Control Box

Pfeiffer TCP5000 Source Turbo Control

Extender Card

ASTEC PSU 48V 31.9A O/P

Source

Terra PC System

Canon COM-RL PCB

Pre-Accel/AMAG Control Chassis

PFS Chassis

Scan Motor Amp

Source/Extraction Leak check box

Kit Replacement NCS PSU

6kV Decel Power Supply

Phantom MXII Interface

Varian E500 Orienter Lamp

Source + Mag Ion Gauge Controller

DC Servo Motor 1000 Series

Canon VME BACK PLANE BG4-6634 BH8-1831

Flight Tube Leak Check Kit

Implanter Wafer Cooling Test Kit

Faraday

Cryo Power Cable

Modified Power Cable

MRS Backing Valve

Ferrofluidic

MVME 215-1

Pre Defining Guides

Laser Sensor Chassis

O RING BS0006 MULTI

Faraday Pre-Amp

Suppression Resistor Box

Mass Flow Controller Low Pressure BF3 5SCCM

Gas Panel Pig Tails

Hard Drive