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VIISION80

  • OEM: Varian
  • OEM Part Number: VIISION80
Description: Model: Varian VIISion 80 high current ion implanter Wafer size: 200mm (8") Condition: Offered as-is and incomplete — requires the components listed below before return to service. Suits a buyer with refurbishment capability, a donor tool, or an existing VIISion / VIISta spares inventory. Overview: The VIISion 80 is a widely supported high current implanter with a large installed base. Individual subsystems and spares remain readily available on the secondary market. Beam current: Up to 2000 µA Energy range: 12 to 300 keV Components required (not include) NumberTerminal system controller E11031662 Analyzer magnet E19013150 Source magnet E19002450 Beam dump E11030900 Dual arc filament E11042920 Filament E19002632 Arc power supply E19002611 Manipulator E11041913 Mass slit E11657400 Chamber system controller E11031672 Stack and driver E19007440
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