VIISION80
- OEM: Varian
- OEM Part Number: VIISION80
Description:
Model: Varian VIISion 80 high current ion implanter
Wafer size: 200mm (8")
Condition: Offered as-is and incomplete — requires the components listed below before return to service. Suits a buyer with refurbishment capability, a donor tool, or an existing VIISion / VIISta spares inventory.
Overview: The VIISion 80 is a widely supported high current implanter with a large installed base. Individual subsystems and spares remain readily available on the secondary market.
Beam current: Up to 2000 µA
Energy range: 12 to 300 keV
Components required (not include)
NumberTerminal system controller E11031662
Analyzer magnet E19013150
Source magnet E19002450
Beam dump E11030900
Dual arc filament E11042920
Filament E19002632
Arc power supply E19002611
Manipulator E11041913
Mass slit E11657400
Chamber system controller E11031672
Stack and driver E19007440
In Stock