VIISION80
- OEM: Varian
- OEM Part Number: VIISION80
Description:
A Varian VIISion 80 high current ion implanter configured for 200mm (8 inch) wafers. This unit is offered as is and incomplete: it requires the components listed below before it can be returned to service. It suits a buyer with refurbishment capability, a donor tool, or an existing VIISion / VIISta spares inventory.The VIISion 80 platform is a widely supported high current implanter, delivering beam current up to 2000 µA across an energy range of 12 to 300 keV on 200mm wafers. As a recognised production tool with a large installed base, individual subsystems and spares remain readily available on the secondary market. CAEComponents required (not included)Terminal system controller, P/N E11031662Analyzer magnet, P/N E19013150Source magnet, P/N E19002450Beam dump, P/N E11030900Dual arc filament, P/N E11042920Filament, P/N E19002632Arc power supply, P/N E19002611Manipulator, P/N E11041913Mass slit, P/N E11657400Chamber system controller, P/N E11031672Stack and driver, P/N E19007440
In Stock
