Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

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COOLING CAN TURBO

End Station Power Distribution Panel

Flood Gun Cooling Lines

Genus VME Bus Extender card

Eaton Beam Monitor Comm Card

Decel Ground Bar

Eaton Fiber Optic Convertor

Extender PCB

Gas Vacuum Line

Extraction Assy Rebuild Kit

Extraction Assy

Extraction Leak Check Vac Can

COOLING CAN EXTRACT

Eaton Unit1100 Relay Control Center PCB

Chamber Feedthrough

Beamstop

Focus Cage

Actuator Bellows

Eaton Filtered High Voltage Driver PCB

Electrode PA Region AKA Bird Cage

DI Pump

Feed Gun Power Supply

Ergo Effector

Clip Actuator

Door Drive Motor & Linear Actuactor

8200 Compressor NEW

APEX 404 Pro Measurement System

Extraction Assemblies (Qty 12)

Flight Tube Covers

Feedthroughs & Shims

Exxtraction Assy

Abb Contactors A30

Exhaust Connectors

Extraction Vac Can

Exhaust Ports

Feed Through Kit

DI Lines + Fittings

DI Filter

Cooling Flange

15 Kv Decel Power Supply

Network Hub

Extraction Body

Dimension 9000 AFM

Alum-A-Lift Beam Stop Extender

ASTEC Power Supply MP6-3L-00

ESG BSC I/O Unit

Flood Gun Fit

Exhaust Baffle

CRYO PUMP N2 PURGE

Glassman Hi Voltage Power Supply

Ground Suppression Power Supply

Electrical Feed Throughs

Flight Tube Leak Check Kit

Faraday

Gas Panel Pig Tails

Eaton Beam Monitor Scan Clock Card K2

Dsource Vac Can

9500xR Consol Umbilical

Extension Lead

Extraction Assy

D Plate Scan

FC Suppressor Power Supply

AMAT Load Lock Filter

Edwards Pump Attachments

Magnet Power Supply

Light Link Repair Kit

Magnet Power Supply

Misc Parts (Lots)

Lift Bracket

Light Links Kit

Misc Cover Plates

Linear Transducer

Light Link Tester

MRS Bushing

Main Power Distribution Panel & Lock

ISO Valve

Magnet Cool Plate

Iso Valve Seal

Graphite Box

GSD 150mm Implanter Disk *

ION Source

IHC Ion Source Assembly

Implanter Wheel - 200mm (Non Populated)

GLASSMAN HIGH VOLTAGE

ION Source Body

Lift & Rotate Assembly

Left Elevator Controller

ION Gauge Tester

Ion Source Controller IHC

Manifold Attachments

Lift & Rotate Controller

Hiden Head

HD PFS

Hotpack Temperature Humidity Oven

Scan Bracket

T/C Door Micro Switch + Vibration

X5FA.P18/X5F.P8

Pneumatics Box Chamber

Scope Leads

PFS Argon Gas Line