Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

9010-02087
27-180262-00
307254
1031291-0067
9090-01128
0090-91124
0040-99226
0100-90710
04-707898-04
0020-97018
9090-00976
PMC75E-2
0303-0116
9010-02164
E110294890
E11001690
INK200-06-27-016
0040-94018
E11001200
0040-01455
5075-90171
0900-91209
0660-90126
0090-91917W
0248A-11011
0660-90092
0567-0196-0001
1101309
0660-00633
E11001669
0100-90759
0100-99008
0090-90713
0110-90533
0120-90182
0120-92124
0090-90947
0090-90463
0100-90824
0100-90863
1140-90022
0540-90000
0090-90379
CHAS WRD RETRO WFR LDR VAC.CNT
0090-90500
0090-90708
0120-91629
0120-91380
0120-90068
0100-90177
0120-90027
0090-90979
0090-90413
0090-90973
0100-90880
0090-90364
0090-90570
0090-90617
0100-90853
0100-90270
0090-90709
0540-90015
0100-90312
0090-91049
0030-90052
0090-90889
0090-91159
NP13TFDMCH
PS/KA-HP996
0090-90368
0090-91796
0090-93091
E04705185-03
1140-00153
1015-5006
MP6-3L-01
MP4-2L-00
0090-91434
0090-90876
0090-91264
REVO RCL065
0090-91634
VB7342674
PA1060 (G48)
REVO RCL062
0090-99037
HEOS-828B-SD
AdTec RF Generator
0090-91071

20095157
10093746
4000294
10096219
10098020
10093932
10094418
10095935
4000290
10096021
10096295
10093955
10094117
20095103
10096104
20095159
10094434
10094892
10095689
4000312
16023844
V158
10096234
10096053
VME162-031
10095261
V170
30000140
20095034
10098027
IES002819
IES002640
IES003111
IES003089
IES002642
IES002768
IES002599
IES002935
IES002619
IES003019
IES002515
IES002525
IES002909
IES002771
IES002652
IES003010
IES002803
IES002985
IES002531
IES003007
IES002573
IES003011
IES003004
IES002664

X Clear Search

Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

MVME 162-031 CPU Card

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

INSULATOR CASTING LEG

Tilt Drive Assy 0-7 Deg

MRS Assembly

PFS Diff. Pump Box Front Cover

X2A/X5A.P5

Thermocouple

Brooks Automation Controller

Chamber Phenumatic Lines

Beamstop Graphite

Vaccum Robot Amplifier Chassis

9500xR Spin Amplifier

Source Bushing

Processor Pneumatic Box + Argon MFC

Vacuum Gauge Interface

X5K.P11/X5FA.P11

Quantum Motor

AMAT Load Lock Filter

Indexer with BNO

Source Flange

Arc Control DSP

15V DC Stepscan Power Supply

Eaton Beam Monitor Scan Clock Card

Main Power Distribution Panel & Lock

Hotpack Temperature Humidity Oven

Flight Tube

Spin Motor Ferro-Fluidic Seal

JL Cup Assy

Orientor Lifter Controller

Indramat Cable

Clamp, filament, R/H

Varian Temperature Monitor

Heatsinks

Hard Drive Formatted Disk Drive

Suppression Box

VME CONTROL PCB VME162-031

Advance Hi-Volt 6KV Pre Accel

Range 500 SCCM Ar-Ventil

Edwards Pump Attachments

MVME 335

Eaton Front Panel Control

Kaiser Systems E Gun

Universal DAQ

Cassette Tilt Bracket (Left and Right)

H1 Standard Gas Interlock

Gas Interlock Toxic SDS

Oriented Control Chassis

Beamline Vacuum Mimic

I/V Converter Wheel

Filament Interface Board

Chassis Plasma Flood

Chassis Module Magnet Control

Gap Servo PCB

PWBA Gas Interlock

Indramat Power Supply

WAMPLIFIER,BLEEDER RESISTOR

Post Accel Control and PA Suppression

Wafer Load Vacuum Control Chassis

CHASSIS WRD MAG FILTER

Wheel Chamber Vacuum Control Chassis

Index Control PCB

Index Servo PCB

Contactor Drive PCB Card

Vacuum Control Drive PWBA

Data Acquisition Inverter PCB Card

CHASSIS MDL SERVO ARM CTLR

A.MAG Rectifier Unit

High Yield Technology System Chassis with Target Chamber

Turbo Pump Interface Board

Source Suppression Power Supply

Beam Line Vacuum Control Chassis

Beam Line Instrumentation Chassis

PWBA Index Servo PCB

PWBA Spin/Scan Detector

Target System Instrumentation Chassis

MODULE PROG UNIT SPIN SCAN FWI

PWB ASSY SPIN SCAN INTERLOCK

ARC MODULE WIRED (EXTND RANGE)

INSULATOR CASTING LEG

Spare Part 0090-90889

Spare Part 0090-91159

Spare Part NP13TFDMCH

Spare Part PS/KA-HP996

Spare Part 0090-90368

Spare Part 0090-91796

Spare Part 0090-93091

Spare Part E04705185-03

Spare Part 1140-00153

Spare Part 1015-5006

MVP Series Modular Switching Power Supply Module

MP4 Series Modular AC/DC Power Supply (48V Output)

Spare Part 0090-91434

Spare Part 0090-90876

Spare Part 0090-91264

Spare Part REVO RCL065

Spare Part 0090-91634

Spare Part VB7342674

G48 Series DC Power Supply (PA1060 (G48))

Spare Part REVO RCL062

Spare Part 0090-99037

Spare Part HEOS-828B-SD

Spare Part AdTec RF Generator

Spare Part 0090-91071