Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

  • 9010-02087
  • 27-180262-00
  • 307254
  • 1031291-0067
  • 9090-01128
  • 0090-91124
  • 0040-99226
  • 0100-90710
  • 04-707898-04
  • 0020-97018
  • 9090-00976
  • PMC75E-2
  • 0303-0116
  • 9010-02164
  • E110294890
  • E11001690
  • INK200-06-27-016
  • 0040-94018
  • E11001200
  • 0040-01455
  • 5075-90171
  • 0900-91209
  • 0660-90126
  • 0090-91917W
  • 0248A-11011
  • 0660-90092
  • 0567-0196-0001
  • 1101309
  • 0660-00633
  • E11001669
  • 0100-90759
  • 0100-99008
  • 0090-90713
  • 0110-90533
  • 0120-90182
  • 0120-92124
  • 0090-90947
  • 0090-90463
  • 0100-90824
  • 0100-90863
  • 1140-90022
  • 0540-90000
  • 0090-90379
  • CHAS WRD RETRO WFR LDR VAC.CNT
  • 0090-90500
  • 0090-90708
  • 0120-91629
  • 0120-91380
  • 0120-90068
  • 0100-90177
  • 0120-90027
  • 0090-90979
  • 0090-90413
  • 0090-90973
  • 0100-90880
  • 0090-90364
  • 0090-90570
  • 0090-90617
  • 0100-90853
  • 0100-90270
  • 0090-90709
  • 0540-90015
  • 0100-90312
  • 0090-91049
  • 0030-90052
  • 0090-90889
  • 0090-91159
  • NP13TFDMCH
  • PS/KA-HP996
  • 0090-90368
  • 0090-91796
  • 0090-93091
  • E04705185-03
  • 1140-00153
  • 1015-5006
  • MP6-3L-01
  • MP4-2L-00
  • 0090-91434
  • 0090-90876
  • 0090-91264
  • REVO RCL065
  • 0090-91634
  • VB7342674
  • PA1060 (G48)
  • REVO RCL062
  • 0090-99037
  • HEOS-828B-SD
  • AdTec RF Generator
  • 0090-91071
  • 20095157
  • 10093746
  • 4000294
  • 10096219
  • 10098020
  • 10093932
  • 10094418
  • 10095935
  • 4000290
  • 10096021
  • 10096295
  • 10093955
  • 10094117
  • 20095103
  • 10096104
  • 20095159
  • 10094434
  • 10094892
  • 10095689
  • 4000312
  • 16023844
  • V158
  • 10096234
  • 10096053
  • VME162-031
  • 10095261
  • V170
  • 30000140
  • 20095034
  • 10098027
  • IES002819
  • IES002640
  • IES003111
  • IES003089
  • IES002642
  • IES002768
  • IES002599
  • IES002935
  • IES002619
  • IES003019
  • IES002515
  • IES002525
  • IES002909
  • IES002771
  • IES002652
  • IES003010
  • IES002803
  • IES002985
  • IES002531
  • IES003007
  • IES002573
  • IES003011
  • IES003004
  • IES002664

Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

MVME 162-031 CPU Card

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

INSULATOR CASTING LEG

Tilt Drive Assy 0-7 Deg

MRS Assembly

PFS Diff. Pump Box Front Cover

X2A/X5A.P5

Thermocouple

Brooks Automation Controller

Chamber Phenumatic Lines

Beamstop Graphite

Vaccum Robot Amplifier Chassis

9500xR Spin Amplifier

Source Bushing

Processor Pneumatic Box + Argon MFC

Vacuum Gauge Interface

X5K.P11/X5FA.P11

Quantum Motor

AMAT Load Lock Filter

Indexer with BNO

Source Flange

Arc Control DSP

15V DC Stepscan Power Supply

Eaton Beam Monitor Scan Clock Card

Main Power Distribution Panel & Lock

Hotpack Temperature Humidity Oven

Flight Tube

Spin Motor Ferro-Fluidic Seal

JL Cup Assy

Orientor Lifter Controller

Indramat Cable

Clamp, filament, R/H

Varian Temperature Monitor

Heatsinks

Hard Drive Formatted Disk Drive

Suppression Box

VME CONTROL PCB VME162-031

Advance Hi-Volt 6KV Pre Accel

Range 500 SCCM Ar-Ventil

Edwards Pump Attachments

MVME 335

Eaton Front Panel Control

Kaiser Systems E Gun

Universal DAQ

Cassette Tilt Bracket (Left and Right)

H1 Standard Gas Interlock

Gas Interlock Toxic SDS

Oriented Control Chassis

Beamline Vacuum Mimic

I/V Converter Wheel

Filament Interface Board

Chassis Plasma Flood

Chassis Module Magnet Control

Gap Servo PCB

PWBA Gas Interlock

Indramat Power Supply

WAMPLIFIER,BLEEDER RESISTOR

Post Accel Control and PA Suppression

Wafer Load Vacuum Control Chassis

CHASSIS WRD MAG FILTER

Wheel Chamber Vacuum Control Chassis

Index Control PCB

Index Servo PCB

Contactor Drive PCB Card

Vacuum Control Drive PWBA

Data Acquisition Inverter PCB Card

CHASSIS MDL SERVO ARM CTLR

A.MAG Rectifier Unit

High Yield Technology System Chassis with Target Chamber

Turbo Pump Interface Board

Source Suppression Power Supply

Beam Line Vacuum Control Chassis

Beam Line Instrumentation Chassis

PWBA Index Servo PCB

PWBA Spin/Scan Detector

Target System Instrumentation Chassis

MODULE PROG UNIT SPIN SCAN FWI

PWB ASSY SPIN SCAN INTERLOCK

ARC MODULE WIRED (EXTND RANGE)

INSULATOR CASTING LEG

Spare Part 0090-90889

Spare Part 0090-91159

Spare Part NP13TFDMCH

Spare Part PS/KA-HP996

Spare Part 0090-90368

Spare Part 0090-91796

Spare Part 0090-93091

Spare Part E04705185-03

Spare Part 1140-00153

Spare Part 1015-5006

MVP Series Modular Switching Power Supply Module

MP4 Series Modular AC/DC Power Supply (48V Output)

Spare Part 0090-91434

Spare Part 0090-90876

Spare Part 0090-91264

Spare Part REVO RCL065

Spare Part 0090-91634

Spare Part VB7342674

G48 Series DC Power Supply (PA1060 (G48))

Spare Part REVO RCL062

Spare Part 0090-99037

Spare Part HEOS-828B-SD

Spare Part AdTec RF Generator

Spare Part 0090-91071

  • 0090-93106
  • 0600-90034
  • 0020-97557
  • 9010-02762
  • E11000092
  • 1140-00248
  • 0020-98908
  • 9090-00803
  • 42749-4011
  • 0010-92170-ITL
  • E15000041
  • 0090-91557
  • 00-678274-01
  • E15000080
  • 0090-91030
  • 5990-0013
  • PAA300F-24
  • 0090-91818
  • 1080-00069
  • 0020-98916
  • 8250HT
  • 1140-90090
  • 0040-95888
  • 0100-99011
  • Y266215A
  • E11035771
  • 9010-00729
  • 0210X-CA24-BCU1
  • 0342-1429-0002
  • 0100-90469
  • 800075V0005
  • SBA-10/100H
  • E42000096
  • E11001622
  • 0090-91558, 0090-91557
  • 8501314000
  • E19002300
  • 0090-91859
  • E19000800
  • 9090-91685
  • 0010-91962
  • 9090-00100
  • 9090-00104
  • 0040-93833
  • A1015850
  • 9010-00081
  • 9090-00626
  • 188859
  • 0150-97070
  • 0100-90183
  • 0090-91917
  • 9090-01331
  • 9090-00801
  • E6549-003
  • 1140-90164, 9090-00801W
  • 00-682216-00
  • 0020-24067/A
  • 0020-25609
  • 0020-80618
  • 9090-00846ITL
  • 0090-91689
  • 0040-45804
  • AP2611365
  • 0100-90945
  • 0270-00296
  • E31000148
  • 76.32.0397.00
  • E11007224
  • 0010-92515
  • E15000110
  • 7408-14H
  • 0090-91890
  • E17036410
  • E11033360
  • 1080-90047
  • E11001000
  • 10095170
  • 16024093
  • 16008849
  • 10094824
  • 4000352
  • 10095695
  • 10096328
  • 16023718
  • 20095106
  • 10094523
  • 4000147
  • 10094868
  • 10097036
  • 10095591
  • 10094092
  • 16016636
  • 10098049
  • 10096374
  • 10094971
  • 10094778
  • 10095532
  • 10095288
  • 4000064
  • 10095360
  • 10095089
  • 10095815
  • 10095263
  • 10095233
  • 10094419
  • 10095762
  • 16024059
  • 10094442
  • 4000122
  • 10096215
  • 10098098
  • 4000318
  • 10094416
  • 10095799
  • 10095485
  • 10096028
  • 10095548
  • 4000356
  • V009
  • 10094031
  • 10098136
  • 10093995
  • 10094700
  • V046
  • 30000562
  • 10095578
  • 16016774
  • 10095658
  • 4000289
  • 10098097
  • 10095681
  • 10094567
  • 10095710
  • 10095084
  • 10095004