Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

  • E11000821
  • E11000090
  • -
  • CHAS WRD RETRO WFR LDR VAC.CNT
  • 0906-0114-0001
  • 5980-0059-0001
  • E11001040
  • 10094734
  • 10095998
  • 10096149
  • 10094872
  • 4000299
  • 10093909
  • 10094013
  • 10093961
  • 10094879
  • 4000306
  • 10095094
  • 10095249
  • V180
  • 10095364
  • V021
  • 10095191
  • 10094831
  • 10096000
  • V041
  • 10095327
  • 0020-41858
  • 10095488
  • 4000316
  • 10095700
  • E11000173
  • 10096006
  • 10095556
  • 10096370
  • 10095064
  • 10095962
  • 10095496
  • 10095379
  • 10094841
  • 10095177
  • 10095499
  • 10095126
  • 10095719
  • V177
  • 10093761
  • 10095915
  • 4000293
  • 10095617
  • 10095285
  • 10095230
  • 10095512
  • 10096118
  • 10094500
  • 4000294
  • 4000290
  • 10095532
  • V154
  • 10095024
  • 10095187
  • 10095500
  • 10095627
  • 10096382
  • 10095192
  • 10095387
  • 10095317
  • 10095516
  • 10096047
  • 10095936
  • 10096310
  • 10095206
  • 10095732
  • 10095123
  • 10095628
  • 10093746
  • 10095935
  • 10095517
  • 10095414
  • 10095718
  • 10095543
  • 3122-0003-0001
  • 10094861
  • 10094670
  • SCU-1000C
  • 10095103
  • 10095360
  • 10095084
  • 10093964
  • 10096380
  • 10095044
  • 10095722
  • V042
  • 10096354
  • 10095349
  • 10095995
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Wafer Handling Effectors

Window

Gripper Box

Set Up Jig

XCE.P2/X6C.P4

Wafer Loader Control Chassis

Vacuum Reducers KF40-25/16

Scanner Assembly

V.Large Torque Wrench

Suppression PSU Power Cable

Source Bushing

Pre Defining Aperture

VME PCB

Right Elevator Controller

Varian E500 Source

Post Accel Drive

Roof Fan

Thermistor Gauge Cable

Pneumatics Box Processor

Source Bushing

Wave Guide Cooling Plate

GUIDE TUBE SUPPORT

SIF 4

X5FA.P10/X5F.P3

Quad Magnet Power Supply

GLASSMAN HIGH VOLTAGE

Water Manifolds

Processor Window (375 x 325 mm)

Graphite

View Ports Windows

Unit 6600

Source ISO Valve

Port Window

Scan Drive Plate

Gate Valve

Portable LCD Monitor

Scan,Amatic Relays

Wafer Loader Valve Seat

Transducer Plate

Scan Arm Ferro-Fluidic Seal

PT VME 330A

Process Chamber PFS Feedthrough Kit

Ground Pneumatic Rod

Suppression PSU Power Cable

Wafer Loader Isolation Valve

Pre Defining Guides

Utilities Pressure Switch

Position Confirmation Sensor

Scan Arm Drive

Wafer Arm Motor Drive Assy

X2A/X5A.P5

X5K.P11/X5FA.P11

Wafer Load Vacuum Control Chassis

PFS Feedthrough

PFS Spares

PFG Arc Power Supply

Pump Baffle

Purge/Vent Valves

Safety Switch IHC Retrofit

PFS Argon Controller

Power Break's

Prometrix Corp Servo Motor Controller / Driver

Safety Lance

Pressure Gauges x3

PFS Cooling Lines

PFS Argon Line

Rear Monitor & Control

Piping Attachments

Pfeiffer TPS-201

PFS Feedthrough Plate

Pfeiffer Vacuum Valve

Pfeiffer Source Turbo

Pipes

Scan Drive

Pneumatic Processor

SHIELD-CAPOTS-ULE

PFS Diff. Pump Box Front Cover

Processor Pneumatic Box + Argon MFC

Unit 6800 Alien Equipment Interface

Vac Chamber Hardware

Varian Leak Test Kit

Transducer Control and Plate

Wentworth 5 Probe Station

View Ports

Unit 4600 Beamline Interface Chassis

Vacuum Interlock Extender Card

Utilities Manifold

STP Controller - SCU1000C

Vacuum Gauge

AMAT Source Leak Check Can

1/4" Turbine

Source Isolation Valve

Accel-Decel Power Supply

AMAT MRS Body

Accel Suppression Power Supply

Source Bushing

Tamarack T404 Laser Air Processing Cabinet

Accel Column

Source Leak Check Cans

200mm Blade + Tip