Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

  • PC833-001
  • 9090-00965
  • 1140-90180
  • 0090-91044
  • 9240-04939
  • 9090-00099
  • 0090-91093
  • 0010-00069
  • 0090-93107
  • 9090-00102
  • 0090-90222
  • 1012-5027
  • 11030030
  • 0090-00617
  • 0090-91379
  • 9090-00186
  • 1220-0003-0021
  • 0090-91135
  • 595-1711-02
  • RM4U-SX1500
  • 0090-91156
  • PM041819AT
  • 0090-91436
  • 0090-91048
  • 4708211
  • E-GUN
  • 0090-91123
  • E11000080
  • 603-3046-02
  • SERVOSTAR610
  • E101927002
  • 9090-01057
  • 0090-90964
  • QUAD ROTATE
  • 0090-91018
  • 0090--91208
  • 0342-1429-0001
  • 0090-91591
  • LSA800
  • 0090-90228
  • PC834-001
  • 0090-90351 / A1008210
  • 600-3284-01
  • 0342-1056
  • E113434003
  • E11038040
  • 9090-00386
  • 1140-90182
  • 0090-91558
  • 0090-90707
  • 9090-01247
  • SERVOSTAR614
  • 9090-00036
  • 3122-0003-0001
  • 1140-98035
  • 9090-00969
  • E19289040
  • N-FE11005383
  • 0090-91632
  • 0090-01161
  • PS/KA-PG-DRIVER
  • 1140-00151
  • REVO RCL063
  • 1100-5114
  • Aerotech 4020
  • 9090-00115
  • 0090-91415
  • 0090-91516
  • 370798503
  • PS/ER06N25
  • 04719414-01
  • 9090-00047
  • 0090-900979
  • 0090-90699
  • 0090-90378
  • 0090-90519 / 0090-90520
  • 1015-5200
  • 0090-91639
  • 0090-91698
  • E11021380
  • 0090-90926
  • 9090-00846
  • 9090-01265
  • 0090-90109
  • 0090-930245
  • 1140-00057
  • 600-3928-01
  • 0090-91619
  • 0090-9463
  • E19000790X
  • 0090-91154
  • 347823-9015-010
  • 0090-90555
  • 0909-00115
  • 9090-00246
  • ESP 1250
  • 9090-00067
  • 9090-00171
  • 9010-00701
  • 481241
  • IES003026
  • IES002679
  • IES002621
  • IES002835
  • IES002663
  • IES002586
  • IES002637
  • IES002793
  • IES002591
  • IES002814
  • IES002773
  • IES003021
  • IES003107
  • IES002576
  • IES002805
  • IES002626
  • IES003072
  • IES002812
  • IES003108
  • IES003123
  • IES002766
  • IES003024
  • IES002700
  • IES002638
  • IES002932
  • IES003044
  • IES002749
  • IES002939
  • IES003116
  • IES002993
  • IES002934
  • IES003033
  • IES002724
  • IES002596
  • IES002677
  • IES003038
  • IES003067
  • IES002569
  • IES003106
  • IES002795
  • IES003025
  • IES002839
  • IES003118
  • IES003071
  • IES002973
  • IES002957
  • IES002748
  • IES002623
  • IES002653
  • IES002676
  • IES003034
  • IES002995
  • IES002592
  • IES003085
  • IES002841
  • IES002671
  • IES003002
  • IES002937
  • IES002610
  • IES002601
  • IES003055
  • IES002620
  • IES003008
  • IES003015
  • IES002538
  • IES003047
  • IES002875
  • IES002611
  • IES003043
  • IES002877
  • IES002933
  • IES002527
  • IES002587
  • IES002555
  • IES002717
  • IES003022
  • IES003012
  • IES002808
  • IES002785
  • IES002980
  • IES002820
  • IES002765
  • IES002870
  • IES002787
  • IES002859
  • IES002624
  • IES003117
  • IES002511
  • IES002674
  • IES002970
  • IES002650
  • IES003018
  • IES002631
  • IES002763
  • IES002802
  • IES002726
  • IES002560
  • IES002609
  • IES002799
  • IES002708

Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

MVME 162-031 CPU Card

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

INSULATOR CASTING LEG

Tilt Drive Assy 0-7 Deg

Spare Part PC833-001

Spare Part 9090-00965

Spare Part 1140-90180

Spare Part 0090-91044

Spare Part 9240-04939

Spare Part 9090-00099

Spare Part 0090-91093

Spare Part 0010-00069

Spare Part 0090-93107

Spare Part 9090-00102

Spare Part 0090-90222

Spare Part 1012-5027

Spare Part 11030030

Spare Part 0090-00617

Spare Part 0090-91379

Spare Part 9090-00186

Spare Part 1220-0003-0021

Spare Part 0090-91135

Spare Part 595-1711-02

Spare Part RM4U-SX1500

Spare Part 0090-91156

Spare Part PM041819AT

Spare Part 0090-91436

Spare Part 0090-91048

Spare Part 4708211

Spare Part E-GUN

Spare Part 0090-91123

Spare Part E11000080

Spare Part 603-3046-02

Spare Part SERVOSTAR610

Spare Part E101927002

Spare Part 9090-01057

Spare Part 0090-90964

Spare Part QUAD ROTATE

Spare Part 0090-91018

Spare Part 0090--91208

Spare Part 0342-1429-0001

Spare Part 0090-91591

Spare Part LSA800

Spare Part 0090-90228

Spare Part PC834-001

Spare Part 0090-90351 / A1008210

Spare Part 600-3284-01

Spare Part 0342-1056

Spare Part E113434003

Spare Part E11038040

Spare Part 9090-00386

Spare Part 1140-90182

Spare Part 0090-91558

Spare Part 0090-90707

Spare Part 9090-01247

Spare Part SERVOSTAR614

Spare Part 9090-00036

Spare Part 3122-0003-0001

Spare Part 1140-98035

Spare Part 9090-00969

Spare Part E19289040

Spare Part N-FE11005383

Spare Part 0090-91632

Spare Part 0090-01161

Spare Part PS/KA-PG-DRIVER

Spare Part 1140-00151

Spare Part REVO RCL063

Spare Part 1100-5114

Spare Part Aerotech 4020

Spare Part 9090-00115

Spare Part 0090-91415

Spare Part 0090-91516

Spare Part 370798503

Spare Part PS/ER06N25

Spare Part 04719414-01

Spare Part 9090-00047

Spare Part 0090-900979

Spare Part 0090-90699

Spare Part 0090-90378

Spare Part 0090-90519 / 0090-90520

Spare Part 1015-5200

Spare Part 0090-91639

Spare Part 0090-91698

Spare Part E11021380

Spare Part 0090-90926

Spare Part 9090-00846

Spare Part 9090-01265

Spare Part 0090-90109

Spare Part 0090-930245

Spare Part 1140-00057

Spare Part 600-3928-01

Options Lift Chassis Assembly

Spare Part 0090-9463

Spare Part E19000790X

Spare Part 0090-91154

Spare Part 347823-9015-010

Spare Part 0090-90555

Spare Part 0909-00115

Spare Part 9090-00246

Spare Part ESP 1250

Spare Part 9090-00067

Spare Part 9090-00171

Spare Part 9010-00701

Spare Part 481241

  • 0090-93106
  • 0600-90034
  • 0020-97557
  • 9010-02762
  • E11000092
  • 1140-00248
  • 0020-98908
  • 9090-00803
  • 42749-4011
  • 0010-92170-ITL
  • E15000041
  • 0090-91557
  • 00-678274-01
  • E15000080
  • 0090-91030
  • 5990-0013
  • PAA300F-24
  • 0090-91818
  • 1080-00069
  • 0020-98916
  • 8250HT
  • 1140-90090
  • 0040-95888
  • 0100-99011
  • Y266215A
  • E11035771
  • 9010-00729
  • 0210X-CA24-BCU1
  • 0342-1429-0002
  • 0100-90469
  • 800075V0005
  • SBA-10/100H
  • E42000096
  • E11001622
  • 0090-91558, 0090-91557
  • 8501314000
  • E19002300
  • 0090-91859
  • E19000800
  • 9090-91685
  • 0010-91962
  • 9090-00100
  • 9090-00104
  • 0040-93833
  • A1015850
  • 9010-00081
  • 9090-00626
  • 188859
  • 0150-97070
  • 0100-90183
  • 0090-91917
  • 9090-01331
  • 9090-00801
  • E6549-003
  • 1140-90164, 9090-00801W
  • 00-682216-00
  • 0020-24067/A
  • 0020-25609
  • 0020-80618
  • 9090-00846ITL
  • 0090-91689
  • 0040-45804
  • AP2611365
  • 0100-90945
  • 0270-00296
  • E31000148
  • 76.32.0397.00
  • E11007224
  • 0010-92515
  • E15000110
  • 7408-14H
  • 0090-91890
  • E17036410
  • E11033360
  • 1080-90047
  • E11001000
  • 10095170
  • 16024093
  • 16008849
  • 10094824
  • 4000352
  • 10095695
  • 10096328
  • 16023718
  • 20095106
  • 10094523
  • 4000147
  • 10094868
  • 10097036
  • 10095591
  • 10094092
  • 16016636
  • 10098049
  • 10096374
  • 10094971
  • 10094778
  • 10095532
  • 10095288
  • 4000064
  • 10095360
  • 10095089
  • 10095815
  • 10095263
  • 10095233
  • 10094419
  • 10095762
  • 16024059
  • 10094442
  • 4000122
  • 10096215
  • 10098098
  • 4000318
  • 10094416
  • 10095799
  • 10095485
  • 10096028
  • 10095548
  • 4000356
  • V009
  • 10094031
  • 10098136
  • 10093995
  • 10094700
  • V046
  • 30000562
  • 10095578
  • 16016774
  • 10095658
  • 4000289
  • 10098097
  • 10095681
  • 10094567
  • 10095710
  • 10095084
  • 10095004