Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

  • REVO RCL061
  • PAT04042
  • 0090-91545
  • PS/EK20N25
  • 5980-0057-0001
  • N1204-APS
  • 0090-91473
  • ADVANCE HIVOT
  • 0090-91062
  • PS/KL030N100YU6
  • 0090-91766
  • 0090-93099
  • 5980-0051-0001
  • E19000090
  • 9090-00586
  • TCR 40T125-1-D
  • E11000211
  • 9090-01168
  • 4240-00579
  • 0090-91132
  • 9090-90979
  • 0090-91621
  • E110012100
  • 0342-1431-0001
  • LF24 / A48019
  • REVO RCL064
  • RF GENERATOR
  • 0090-91063
  • 0090-91167
  • 9090-00958
  • 1014-5102/5202
  • MAC112A-0-VD-4-C
  • Contactor Drive
  • TEMP057-6
  • E11000820
  • REVO RCL060
  • NHRR 01001k-L05E1M01
  • 906042
  • 0090-91469
  • PS/MK20P03.7
  • 0090-00115
  • E11000020
  • 2000961
  • E11000140
  • 0090-93034
  • 1014-5003
  • 0240-61442
  • 0090-91927
  • 0240-96143
  • 0090-91251
  • 3122-0004-0001
  • 0906-0146-0001
  • E19000092
  • 3122-0002-0001
  • PX13C
  • 0500-00221
  • 250FE Cryo Pump
  • 9090-00172
  • 9090-00473
  • 0240-96153
  • Farnell G48
  • 0090-91332
  • 9090-00859
  • 1027-0072-0001
  • 0090--91193
  • 0090-91465
  • 3122-0001-0001
  • PS/MK20P03
  • E11000101A
  • 0906-0110-0001
  • 0090-91494
  • 0090-91209
  • 0090-90565
  • 0090-91824
  • 0010-91582
  • IES003006
  • IES003109
  • IES002537
  • IES002967
  • IES003061
  • IES002532
  • IES002747
  • IES002844
  • IES002630
  • IES002855
  • IES002585
  • IES002789
  • IES003063
  • IES002991
  • IES002687
  • IES002990
  • IES002955
  • IES003039
  • IES002590
  • IES002719
  • IES002584
  • IES002825
  • IES002975
  • IES003068
  • IES003020
  • IES003009
  • IES003016
  • IES002672
  • IES002572
  • IES002658
  • IES003014
  • IES003115
  • IES002645
  • IES003013
  • IES002952
  • IES003005
  • IES003023
  • IES002981
  • IES002604
  • IES003113
  • IES003046
  • IES002914
  • IES003110
  • IES002930
  • IES002902
  • IES003017
  • IES002847
  • IES002811
  • IES002849
  • IES002566
  • IES003080
  • IES003058
  • IES002992
  • IES003083
  • IES003032
  • IES003045
  • IES003054
  • IES002608
  • IES002869
  • IES002845
  • IES002528
  • IES002627
  • IES002691
  • IES003082
  • IES002547
  • IES002823
  • IES003086
  • IES003065
  • IES002963
  • IES003096
  • IES002788
  • IES002767
  • IES002629
  • IES003128

Latest Parts

ATMOS ELEV WH I/F ASSY

Wafer Arm Transfer Motor (NEW)

Post Accel Converter 160kV

CIP Implanter Wheel - 200mm (Non Populated)

Direct Drive Spin Motor 9500XR / XR80 Series *

0-30KV Power Supply

Wafer Handler Drive Assy

MVME 162-031 CPU Card

Accel Suppression Power Supply

GLASSMAN HIGH VOLTAGE

Hollow Gripper 8" 200mm

Graphics Card PCB

VME CONTROL PCB VME162-031

Chassis Plasma Flood

INSULATOR CASTING LEG

Tilt Drive Assy 0-7 Deg

Spare Part REVO RCL061

Spare Part PAT04042

Spare Part 0090-91545

Spare Part PS/EK20N25

Spare Part 5980-0057-0001

N1204-APS High-Current DC Power Supply

Spare Part 0090-91473

Spare Part ADVANCE HIVOT

Spare Part 0090-91062

Spare Part PS/KL030N100YU6

Spare Part 0090-91766

Spare Part 0090-93099

Spare Part 5980-0051-0001

Spare Part E19000090

Spare Part 9090-00586

Spare Part TCR 40T125-1-D

Spare Part E11000211

Spare Part 9090-01168

Spare Part 4240-00579

Spare Part 0090-91132

Spare Part 9090-90979

Spare Part 0090-91621

Spare Part E110012100

Spare Part 0342-1431-0001

Spare Part LF24 / A48019

Spare Part REVO RCL064

Spare Part RF GENERATOR

Spare Part 0090-91063

Spare Part 0090-91167

Spare Part 9090-00958

Spare Part 1014-5102/5202

Spare Part MAC112A-0-VD-4-C

Spare Part Contactor Drive

Spare Part TEMP057-6

Spare Part E11000820

Spare Part REVO RCL060

Spare Part NHRR 01001k-L05E1M01

Spare Part 906042

Spare Part 0090-91469

Spare Part PS/MK20P03.7

Spare Part 0090-00115

Spare Part E11000020

Spare Part 2000961

Spare Part E11000140

Spare Part 0090-93034

Spare Part 1014-5003

Spare Part 0240-61442

Spare Part 0090-91927

Spare Part 0240-96143

Spare Part 0090-91251

Spare Part 3122-0004-0001

Spare Part 0906-0146-0001

Spare Part E19000092

Spare Part 3122-0002-0001

Spare Part PX13C

Spare Part 0500-00221

Spare Part 250FE Cryo Pump

Spare Part 9090-00172

Spare Part 9090-00473

Spare Part 0240-96153

G48 Series 48V Switch-Mode DC Power Supply

Spare Part 0090-91332

Spare Part 9090-00859

Spare Part 1027-0072-0001

Spare Part 0090--91193

Spare Part 0090-91465

Spare Part 3122-0001-0001

Spare Part PS/MK20P03

Spare Part E11000101A

Spare Part 0906-0110-0001

Spare Part 0090-91494

Spare Part 0090-91209

Spare Part 0090-90565

Arc Control DSP

Tilt Drive Assy 0-7 Deg

  • 0090-93106
  • 0600-90034
  • 0020-97557
  • 9010-02762
  • E11000092
  • 1140-00248
  • 0020-98908
  • 9090-00803
  • 42749-4011
  • 0010-92170-ITL
  • E15000041
  • 0090-91557
  • 00-678274-01
  • E15000080
  • 0090-91030
  • 5990-0013
  • PAA300F-24
  • 0090-91818
  • 1080-00069
  • 0020-98916
  • 8250HT
  • 1140-90090
  • 0040-95888
  • 0100-99011
  • Y266215A
  • E11035771
  • 9010-00729
  • 0210X-CA24-BCU1
  • 0342-1429-0002
  • 0100-90469
  • 800075V0005
  • SBA-10/100H
  • E42000096
  • E11001622
  • 0090-91558, 0090-91557
  • 8501314000
  • E19002300
  • 0090-91859
  • E19000800
  • 9090-91685
  • 0010-91962
  • 9090-00100
  • 9090-00104
  • 0040-93833
  • A1015850
  • 9010-00081
  • 9090-00626
  • 188859
  • 0150-97070
  • 0100-90183
  • 0090-91917
  • 9090-01331
  • 9090-00801
  • E6549-003
  • 1140-90164, 9090-00801W
  • 00-682216-00
  • 0020-24067/A
  • 0020-25609
  • 0020-80618
  • 9090-00846ITL
  • 0090-91689
  • 0040-45804
  • AP2611365
  • 0100-90945
  • 0270-00296
  • E31000148
  • 76.32.0397.00
  • E11007224
  • 0010-92515
  • E15000110
  • 7408-14H
  • 0090-91890
  • E17036410
  • E11033360
  • 1080-90047
  • E11001000
  • 10095170
  • 16024093
  • 16008849
  • 10094824
  • 4000352
  • 10095695
  • 10096328
  • 16023718
  • 20095106
  • 10094523
  • 4000147
  • 10094868
  • 10097036
  • 10095591
  • 10094092
  • 16016636
  • 10098049
  • 10096374
  • 10094971
  • 10094778
  • 10095532
  • 10095288
  • 4000064
  • 10095360
  • 10095089
  • 10095815
  • 10095263
  • 10095233
  • 10094419
  • 10095762
  • 16024059
  • 10094442
  • 4000122
  • 10096215
  • 10098098
  • 4000318
  • 10094416
  • 10095799
  • 10095485
  • 10096028
  • 10095548
  • 4000356
  • V009
  • 10094031
  • 10098136
  • 10093995
  • 10094700
  • V046
  • 30000562
  • 10095578
  • 16016774
  • 10095658
  • 4000289
  • 10098097
  • 10095681
  • 10094567
  • 10095710
  • 10095084
  • 10095004