Parts Store

Our parts inventory includes thousands of parts and assemblies for ion implanters and other semiconductor equipment. This ensures quick access to needed parts, reducing downtime and improving efficiency.

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ARC Power Supply

0-30KV Power Supply

IHC Chassis

MVME 162-031 CPU Card

5 Phase Stepper Controller *

Source Magnet Power Supply (New)

60KV Stack

QUAD ROTATE CONTROLLER

SCIM Box

200KV Stack

Spin Power Unit

ESS Magnet Power Supply

Cold Cathode Vacuum Controller

CIP Implanter Wheel - 200mm (Non Populated)

Constant Voltage Current Power Supply

Direct Drive Spin Motor 9500XR / XR80 Series *

Wafer Handler Drive Assy

WHIM Wafer Arm

Source Magnet Power Supply

Source Magnet Power Supply

Filament Power Supply

Accel Suppression Power Supply

Wafer Arm Servo Motor

VME CONTROL PCB VME162-031

Beam Stop 9500XR

Laser Sensor Chassis PX41M

Stepscan AMP Interface

Source / Magnet Turbo Controller

AMAT 9500xR Isolation Transformer

80KV Converter

Tamarack Laser System TSC 411

6KW Converter

Scan Tranducer Assy

Step Scan Mains Line Filter

200MM Flat Aligner

AC-Servo

STP Control Unit PXP80K/PXP80J

Turbo Controller Seiko Seiki

SHIELD GUIDE TUBE BOTTOM

8 Port Ethernet Switch

Unit 4500 Relay Interface Chassy

Target System Ppneumatics Box

Accel Column

Spacers

Spectra Analyser

Analog Control PCB Vision

Suppression Power Supply

6kV Suppression Power Supply

Vacuum Control Feedback PCB

6 Kev Pre Accel Power Supply

60 KV Mirror Power Supply

200mm SI Cooled Platen

300kv HV Probe

Suppression Clamping Box

Source Turbo Valve

Source Magnet Control PCB

60kV HIGH VOLTAGE CONVERTER 0090-91246

Spin Control PCB

Shorting Bar

SOURCE MAGNET CONTROL PCB

Support Shields

SEAL FLIGHTTUBE COVER ACCESS

Spin Scan Detector

9500 Wafer Loader Contoller Pneumatic Box

Turbo Pump

Tetrode Power Supply

SHIELD GRAPHITE PRE MRS SLIT

Spin Scan Error PCB

ESS PSU 80V 185A 15KW DUAL

Step Scan Turbo Controller

AC Synchronous Generator

A-Mag Power Supply

Top Assy DCP88I 512K 4 Port PCB

4 Phase Stepper Extender Card

Air Bearing E19002370

Shorting Bar

Source Manipulator Suppression Bracket

Time Lapse VCR

80KV Stack

SEAL GASKET BEAMSTOP 3 POSITION

Source Term Data Link

9500xR Spin Amplifier

200mm Lift and Rotate Cassette Trays

Source Handles

Tunnel Humidity Controller

60KV Mirror Assy

Alum-A-Lift Bracket

Analyzer Magnets Eaton

3 Cyro Remote Switch

6" Ceramic Ring Shield

Tilt Angle Control

Suppression Supply

Source Bushing

SLEEVE FILTER KF32L 5-10 HM

Shim 5mm

Suppression Resistor Box

Spin Control PCB

All-Metal Angle Valve

Step Scan AMP

Shield Cavity 6

0567-0212-000 - Micro Step Controller - Image 1

Micro Step Controller

  • OEM: Eaton
  • OEM Part Number: 0567-0212-000
Description: Micro Step Controller
In Stock
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