Tamarack Laser System TSC 411

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OEM Part Number: TSC 411

Description:

Tamarack (Suss Microtec) T404 248nm KrF UV Excimer laser system using Novaline 100 (Coherent Laser) rated at 100W.

Model TSC 411

Serial No 411-9001

Optics optimised for 248nm and square beam 30x30mm homogenised light through a mask further reduced to 5mmx5mm on the substrate.
Optics enclosed in Nitrogen environments.
Chuck optimised for either 355.6mmx355.6mm glass sizes or smaller substrate sizes of 100mmx80mm and 4”x4” glass can be processed with an optional vacuum setting.
Stage speed maximum 300mm/sec
Stage Alignment accuracy 1-2microns.
Manual attenuation system
Tamarack User Interface and Database Editor to program laser recipes.

Additional items include Tamarack Laser Air Handling Unit and Novaline 100 Coherent Laser

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