image-1
image-2
image-3
image-4

Axcelis 160KV upgrade Kit

  • OEM: Axcelis
  • OEM Part Number: Axcelis 160KV upgrade Kit
Description: Axcelis 160KV upgrade Kit Terminal EXH Kit - 72097 (1199850) Terminal EXH Kit - 72099 (1185620) LED Ultra - 71934 (11032780) Gas Line chamber - 71931 (0050-76664) Graphite Sheild E-Shower - 71938 (17121720) Faraday Flag Assy - 71937 (1141471) Chamber End Plate - No number Flag Faraday - 71935 (1181831) Bracket Angled - 17068520 EXH Kit - 17051500 Cover - 17081180 Cover Terminal - 17067300 Cover - 17067720 Cover Term Box - 1710831 Cover Terminal Plate - 17071160 Ground Graph Scan - E17026680 Plasma Shower - 71938 Plasma Shower Gun Assy - 1190160 Suppress Electrode Kit - 71939 SCE RGH Valve - 1181490 Arc Power Supply - 1204990 SDI ID - 17080520 Accel PSU - 71893 Glassman HVPS Dual 5KV - 2200109 Seiko Seiki STP-1000C PSU - 71915 Seiko Seiki STP-1000C Pump - 69878 Cover Flex - 17074820 Spacer Kit - 17022380 Cover Red Box - 17071140 Cover Red Box - 17071130 Plastic Bracket - 17249920 Plate - 172021871 Rev B Plate - 17021871 Rev A Graphite - 17335010 Cover upper Plasma Shower - 17249760 Lower Plasma Shower - 17249920 Upper Plasma Shower - 17249760 Ground Electrode - 17335030 G/Shield Electrode Shower - 17121720 Rev A Cathode Bracket - 1706405 Ultra PEF - 17304680 Graphite - 17335010 Graphite - 1766531 Filter Box - 1184260 Flag faraday Assy - 1181831 ELS Upgrade - 17103190 Air Dist Manifold - 1169724 Kit - 17095340-C Source align Jig - 17127550 Plastic Lid - 17099070 Corona Ring - 17100170 Plastic Lid - 71926 Non Puline - 71926 Metal Bracket - 1199240
In Stock

More products from Axcelis

Unit 4700 End Station Interface Chassis

Cryo Screen

ASSY Bellow Rotate

Axcelis 150/200pc

CRYO VANE

Unit 4900 End Station Cryo Monitor Interface

Filament Supply Assy MOD DTC

Part LSA800

330 Ionization Gauge Controller

GSD200 Sun Sparcstation 5 PC

Unit 4500 Relay Interface Chassis

Unit 4400 Implanter Terminal Interface Chassis

Unit 1600 Autocool Wafer Cooling Chassis

Part 11030030

Ion Gauge Controller 0906-0089-0001

GLASSMAN HIGH VOLTAGE

GSD 150mm Implanter Disk *

Unit 4600 Beamline Interface Chassis

Power Supply Accelerator Column

GSD200 Terminal Isolation Transformer

Unit 4600 Beamline Interface Chassis

Unit 6800 Alien Equipment Interface

GSD Transformer

Unit 5600 Beam Current Amplifier

Unit 900 Scan Amplifier Assy

  • 0090-93106
  • 0600-90034
  • 0020-97557
  • 9010-02762
  • E11000092
  • 1140-00248
  • 0020-98908
  • 9090-00803
  • 42749-4011
  • 0010-92170-ITL
  • E15000041
  • 0090-91557
  • 00-678274-01
  • E15000080
  • 0090-91030
  • 5990-0013
  • PAA300F-24
  • 0090-91818
  • 1080-00069
  • 0020-98916
  • 8250HT
  • 1140-90090
  • 0040-95888
  • 0100-99011
  • Y266215A
  • E11035771
  • 9010-00729
  • 0210X-CA24-BCU1
  • 0342-1429-0002
  • 0100-90469
  • 800075V0005
  • SBA-10/100H
  • E42000096
  • E11001622
  • 0090-91558, 0090-91557
  • 8501314000
  • E19002300
  • 0090-91859
  • E19000800
  • 9090-91685
  • 0010-91962
  • 9090-00100
  • 9090-00104
  • 0040-93833
  • A1015850
  • 9010-00081
  • 9090-00626
  • 188859
  • 0150-97070
  • 0100-90183
  • 0090-91917
  • 9090-01331
  • 9090-00801
  • E6549-003
  • 1140-90164, 9090-00801W
  • 00-682216-00
  • 0020-24067/A
  • 0020-25609
  • 0020-80618
  • 9090-00846ITL
  • 0090-91689
  • 0040-45804
  • AP2611365
  • 0100-90945
  • 0270-00296
  • E31000148
  • 76.32.0397.00
  • E11007224
  • 0010-92515
  • E15000110
  • 7408-14H
  • 0090-91890
  • E17036410
  • E11033360
  • 1080-90047
  • E11001000
  • 10095170
  • 16024093
  • 16008849
  • 10094824
  • 4000352
  • 10095695
  • 10096328
  • 16023718
  • 20095106
  • 10094523
  • 4000147
  • 10094868
  • 10097036
  • 10095591
  • 10094092
  • 16016636
  • 10098049
  • 10096374
  • 10094971
  • 10094778
  • 10095532
  • 10095288
  • 4000064
  • 10095360
  • 10095089
  • 10095815
  • 10095263
  • 10095233
  • 10094419
  • 10095762
  • 16024059
  • 10094442
  • 4000122
  • 10096215
  • 10098098
  • 4000318
  • 10094416
  • 10095799
  • 10095485
  • 10096028
  • 10095548
  • 4000356
  • V009
  • 10094031
  • 10098136
  • 10093995
  • 10094700
  • V046
  • 30000562
  • 10095578
  • 16016774
  • 10095658
  • 4000289
  • 10098097
  • 10095681
  • 10094567
  • 10095710
  • 10095084
  • 10095004